JPS50140381A - - Google Patents
Info
- Publication number
- JPS50140381A JPS50140381A JP4776474A JP4776474A JPS50140381A JP S50140381 A JPS50140381 A JP S50140381A JP 4776474 A JP4776474 A JP 4776474A JP 4776474 A JP4776474 A JP 4776474A JP S50140381 A JPS50140381 A JP S50140381A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4776474A JPS50140381A (ja) | 1974-04-30 | 1974-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4776474A JPS50140381A (ja) | 1974-04-30 | 1974-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50140381A true JPS50140381A (ja) | 1975-11-11 |
Family
ID=12784426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4776474A Pending JPS50140381A (ja) | 1974-04-30 | 1974-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50140381A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51137681A (en) * | 1975-05-23 | 1976-11-27 | Tokuda Seisakusho Ltd | Sputtering apparatus |
| JPS5923870A (ja) * | 1982-07-09 | 1984-02-07 | バリアン・アソシエイツ・インコ−ポレイテツド | スパツタコ−テイング装置に使用する特別の材料のタ−ゲツト組立体 |
-
1974
- 1974-04-30 JP JP4776474A patent/JPS50140381A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51137681A (en) * | 1975-05-23 | 1976-11-27 | Tokuda Seisakusho Ltd | Sputtering apparatus |
| JPS5622951B2 (ja) * | 1975-05-23 | 1981-05-28 | ||
| JPS5923870A (ja) * | 1982-07-09 | 1984-02-07 | バリアン・アソシエイツ・インコ−ポレイテツド | スパツタコ−テイング装置に使用する特別の材料のタ−ゲツト組立体 |
| JPH0251981B2 (ja) * | 1982-07-09 | 1990-11-09 | Varian Associates |