JPS50139082A - - Google Patents

Info

Publication number
JPS50139082A
JPS50139082A JP4721474A JP4721474A JPS50139082A JP S50139082 A JPS50139082 A JP S50139082A JP 4721474 A JP4721474 A JP 4721474A JP 4721474 A JP4721474 A JP 4721474A JP S50139082 A JPS50139082 A JP S50139082A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4721474A
Other languages
Japanese (ja)
Other versions
JPS559058B2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4721474A priority Critical patent/JPS559058B2/ja
Publication of JPS50139082A publication Critical patent/JPS50139082A/ja
Publication of JPS559058B2 publication Critical patent/JPS559058B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4721474A 1974-04-26 1974-04-26 Expired JPS559058B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4721474A JPS559058B2 (cg-RX-API-DMAC10.html) 1974-04-26 1974-04-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4721474A JPS559058B2 (cg-RX-API-DMAC10.html) 1974-04-26 1974-04-26

Publications (2)

Publication Number Publication Date
JPS50139082A true JPS50139082A (cg-RX-API-DMAC10.html) 1975-11-06
JPS559058B2 JPS559058B2 (cg-RX-API-DMAC10.html) 1980-03-07

Family

ID=12768894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4721474A Expired JPS559058B2 (cg-RX-API-DMAC10.html) 1974-04-26 1974-04-26

Country Status (1)

Country Link
JP (1) JPS559058B2 (cg-RX-API-DMAC10.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59197145A (ja) * 1979-12-21 1984-11-08 バリアン・アソシエイツ・インコ−ポレイテツド ウエ−ハ処理装置
US4842683A (en) * 1986-12-19 1989-06-27 Applied Materials, Inc. Magnetic field-enhanced plasma etch reactor
US4909314A (en) * 1979-12-21 1990-03-20 Varian Associates, Inc. Apparatus for thermal treatment of a wafer in an evacuated environment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59197145A (ja) * 1979-12-21 1984-11-08 バリアン・アソシエイツ・インコ−ポレイテツド ウエ−ハ処理装置
US4909314A (en) * 1979-12-21 1990-03-20 Varian Associates, Inc. Apparatus for thermal treatment of a wafer in an evacuated environment
US4842683A (en) * 1986-12-19 1989-06-27 Applied Materials, Inc. Magnetic field-enhanced plasma etch reactor

Also Published As

Publication number Publication date
JPS559058B2 (cg-RX-API-DMAC10.html) 1980-03-07

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