JPS50137482A - - Google Patents
Info
- Publication number
- JPS50137482A JPS50137482A JP4404674A JP4404674A JPS50137482A JP S50137482 A JPS50137482 A JP S50137482A JP 4404674 A JP4404674 A JP 4404674A JP 4404674 A JP4404674 A JP 4404674A JP S50137482 A JPS50137482 A JP S50137482A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4404674A JPS5330591B2 (en:Method) | 1974-04-18 | 1974-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4404674A JPS5330591B2 (en:Method) | 1974-04-18 | 1974-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50137482A true JPS50137482A (en:Method) | 1975-10-31 |
| JPS5330591B2 JPS5330591B2 (en:Method) | 1978-08-28 |
Family
ID=12680660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4404674A Expired JPS5330591B2 (en:Method) | 1974-04-18 | 1974-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5330591B2 (en:Method) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50147682A (en:Method) * | 1974-05-15 | 1975-11-26 | ||
| JPS5518082U (en:Method) * | 1978-07-24 | 1980-02-05 | ||
| JPS58158942A (ja) * | 1982-03-17 | 1983-09-21 | Hitachi Ltd | 半導体集積回路装置とその製造法 |
| JPS6266645A (ja) * | 1985-09-18 | 1987-03-26 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4846276A (en:Method) * | 1971-10-12 | 1973-07-02 |
-
1974
- 1974-04-18 JP JP4404674A patent/JPS5330591B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4846276A (en:Method) * | 1971-10-12 | 1973-07-02 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50147682A (en:Method) * | 1974-05-15 | 1975-11-26 | ||
| JPS5518082U (en:Method) * | 1978-07-24 | 1980-02-05 | ||
| JPS58158942A (ja) * | 1982-03-17 | 1983-09-21 | Hitachi Ltd | 半導体集積回路装置とその製造法 |
| JPS6266645A (ja) * | 1985-09-18 | 1987-03-26 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5330591B2 (en:Method) | 1978-08-28 |