JPS50136383A - - Google Patents

Info

Publication number
JPS50136383A
JPS50136383A JP50037393A JP3739375A JPS50136383A JP S50136383 A JPS50136383 A JP S50136383A JP 50037393 A JP50037393 A JP 50037393A JP 3739375 A JP3739375 A JP 3739375A JP S50136383 A JPS50136383 A JP S50136383A
Authority
JP
Japan
Prior art keywords
dielectric
depositing
electrode
metal
silicon substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50037393A
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS50136383A publication Critical patent/JPS50136383A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/977—Thinning or removal of substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP50037393A 1974-07-17 1975-03-26 Pending JPS50136383A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US489456A US3894872A (en) 1974-07-17 1974-07-17 Technique for fabricating high Q MIM capacitors

Publications (1)

Publication Number Publication Date
JPS50136383A true JPS50136383A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-10-29

Family

ID=23943938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50037393A Pending JPS50136383A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-07-17 1975-03-26

Country Status (6)

Country Link
US (1) US3894872A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS50136383A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA1025071A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2514139A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2279211A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1459990A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2818624C2 (de) * 1978-04-27 1987-03-12 Roederstein Spezialfabriken für Bauelemente der Elektronik und Kondensatoren der Starkstromtechnik GmbH, 8300 Landshut Verfahren zur Herstellung eines elektrischen Kondensators
JPS6151869A (ja) * 1984-08-20 1986-03-14 Mitsubishi Electric Corp 半導体記憶装置およびその製造方法
JP2002515178A (ja) * 1995-03-27 2002-05-21 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ 電子多層素子の製造方法
KR100275727B1 (ko) 1998-01-06 2001-01-15 윤종용 반도체 장치의 커패시터 형성방법
US6566971B1 (en) * 2000-02-24 2003-05-20 Broadcom Corporation Method and circuitry for implementing a differentially tuned varactor-inductor oscillator
US6284590B1 (en) * 2000-11-30 2001-09-04 Chartered Semiconductor Manufacturing Ltd. Method to eliminate top metal corner shaping during bottom metal patterning for MIM capacitors
US8407871B2 (en) * 2009-07-06 2013-04-02 Delphi Technologies, Inc. Method of manufacturing a shapeable short-resistant capacitor
US8375539B2 (en) 2009-08-05 2013-02-19 International Business Machines Corporation Method of manufacturing complimentary metal-insulator-metal (MIM) capacitors
US9412806B2 (en) 2014-06-13 2016-08-09 Invensas Corporation Making multilayer 3D capacitors using arrays of upstanding rods or ridges
US9397038B1 (en) 2015-02-27 2016-07-19 Invensas Corporation Microelectronic components with features wrapping around protrusions of conductive vias protruding from through-holes passing through substrates

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL294675A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1962-06-29
US3274025A (en) * 1963-12-13 1966-09-20 Corning Glass Works Method of forming an electrical capacitor
US3385729A (en) * 1964-10-26 1968-05-28 North American Rockwell Composite dual dielectric for isolation in integrated circuits and method of making

Also Published As

Publication number Publication date
GB1459990A (en) 1976-12-31
US3894872A (en) 1975-07-15
FR2279211A1 (fr) 1976-02-13
CA1025071A (en) 1978-01-24
DE2514139A1 (de) 1976-01-29

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