JPS5013274A - - Google Patents

Info

Publication number
JPS5013274A
JPS5013274A JP6526273A JP6526273A JPS5013274A JP S5013274 A JPS5013274 A JP S5013274A JP 6526273 A JP6526273 A JP 6526273A JP 6526273 A JP6526273 A JP 6526273A JP S5013274 A JPS5013274 A JP S5013274A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6526273A
Other languages
Japanese (ja)
Other versions
JPS5217829B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6526273A priority Critical patent/JPS5217829B2/ja
Publication of JPS5013274A publication Critical patent/JPS5013274A/ja
Publication of JPS5217829B2 publication Critical patent/JPS5217829B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP6526273A 1973-06-08 1973-06-08 Expired JPS5217829B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6526273A JPS5217829B2 (en) 1973-06-08 1973-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6526273A JPS5217829B2 (en) 1973-06-08 1973-06-08

Publications (2)

Publication Number Publication Date
JPS5013274A true JPS5013274A (en) 1975-02-12
JPS5217829B2 JPS5217829B2 (en) 1977-05-18

Family

ID=13281812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6526273A Expired JPS5217829B2 (en) 1973-06-08 1973-06-08

Country Status (1)

Country Link
JP (1) JPS5217829B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5267632A (en) * 1975-12-03 1977-06-04 Hitachi Ltd Method for producing information recording material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5267632A (en) * 1975-12-03 1977-06-04 Hitachi Ltd Method for producing information recording material

Also Published As

Publication number Publication date
JPS5217829B2 (en) 1977-05-18

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