JPS50130363A - - Google Patents
Info
- Publication number
- JPS50130363A JPS50130363A JP3554774A JP3554774A JPS50130363A JP S50130363 A JPS50130363 A JP S50130363A JP 3554774 A JP3554774 A JP 3554774A JP 3554774 A JP3554774 A JP 3554774A JP S50130363 A JPS50130363 A JP S50130363A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3554774A JPS5339234B2 (xx) | 1974-04-01 | 1974-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3554774A JPS5339234B2 (xx) | 1974-04-01 | 1974-04-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50130363A true JPS50130363A (xx) | 1975-10-15 |
| JPS5339234B2 JPS5339234B2 (xx) | 1978-10-20 |
Family
ID=12444741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3554774A Expired JPS5339234B2 (xx) | 1974-04-01 | 1974-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5339234B2 (xx) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53149194A (en) * | 1977-05-31 | 1978-12-26 | Sharp Corp | Coating method for graphite substrate with silicon carbide |
| JPH01282112A (ja) * | 1988-05-10 | 1989-11-14 | Sumitomo Electric Ind Ltd | 被覆炭素材料 |
| JPH0397691A (ja) * | 1989-09-08 | 1991-04-23 | Fujitsu Ltd | 半導体装置製造用治具 |
| JPH03112131A (ja) * | 1989-09-27 | 1991-05-13 | Toshiba Ceramics Co Ltd | 半導体製造用ｓｉｃ質セラミックス製品 |
| JP2012184152A (ja) * | 2011-03-08 | 2012-09-27 | Ibiden Co Ltd | セラミックス基材支持具及びセラミックス部材の製造方法 |
-
1974
- 1974-04-01 JP JP3554774A patent/JPS5339234B2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53149194A (en) * | 1977-05-31 | 1978-12-26 | Sharp Corp | Coating method for graphite substrate with silicon carbide |
| JPH01282112A (ja) * | 1988-05-10 | 1989-11-14 | Sumitomo Electric Ind Ltd | 被覆炭素材料 |
| JP2567455B2 (ja) * | 1988-05-10 | 1996-12-25 | 住友電気工業株式会社 | 被覆炭素材料 |
| JPH0397691A (ja) * | 1989-09-08 | 1991-04-23 | Fujitsu Ltd | 半導体装置製造用治具 |
| JPH03112131A (ja) * | 1989-09-27 | 1991-05-13 | Toshiba Ceramics Co Ltd | 半導体製造用ｓｉｃ質セラミックス製品 |
| JP2012184152A (ja) * | 2011-03-08 | 2012-09-27 | Ibiden Co Ltd | セラミックス基材支持具及びセラミックス部材の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5339234B2 (xx) | 1978-10-20 |