JPS50129784U - - Google Patents

Info

Publication number
JPS50129784U
JPS50129784U JP4097274U JP4097274U JPS50129784U JP S50129784 U JPS50129784 U JP S50129784U JP 4097274 U JP4097274 U JP 4097274U JP 4097274 U JP4097274 U JP 4097274U JP S50129784 U JPS50129784 U JP S50129784U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4097274U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4097274U priority Critical patent/JPS50129784U/ja
Publication of JPS50129784U publication Critical patent/JPS50129784U/ja
Pending legal-status Critical Current

Links

JP4097274U 1974-04-15 1974-04-15 Pending JPS50129784U (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4097274U JPS50129784U (es) 1974-04-15 1974-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4097274U JPS50129784U (es) 1974-04-15 1974-04-15

Publications (1)

Publication Number Publication Date
JPS50129784U true JPS50129784U (es) 1975-10-24

Family

ID=28167570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4097274U Pending JPS50129784U (es) 1974-04-15 1974-04-15

Country Status (1)

Country Link
JP (1) JPS50129784U (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101065329B1 (ko) 2009-03-24 2011-09-16 세메스 주식회사 기판 이송 장치 및 이를 갖는 기판 세정 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS454743Y1 (es) * 1967-09-07 1970-03-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS454743Y1 (es) * 1967-09-07 1970-03-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101065329B1 (ko) 2009-03-24 2011-09-16 세메스 주식회사 기판 이송 장치 및 이를 갖는 기판 세정 장치

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