JPS5012959A - - Google Patents

Info

Publication number
JPS5012959A
JPS5012959A JP48041281A JP4128173A JPS5012959A JP S5012959 A JPS5012959 A JP S5012959A JP 48041281 A JP48041281 A JP 48041281A JP 4128173 A JP4128173 A JP 4128173A JP S5012959 A JPS5012959 A JP S5012959A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48041281A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48041281A priority Critical patent/JPS5012959A/ja
Publication of JPS5012959A publication Critical patent/JPS5012959A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP48041281A 1973-04-13 1973-04-13 Pending JPS5012959A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48041281A JPS5012959A (enrdf_load_stackoverflow) 1973-04-13 1973-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48041281A JPS5012959A (enrdf_load_stackoverflow) 1973-04-13 1973-04-13

Publications (1)

Publication Number Publication Date
JPS5012959A true JPS5012959A (enrdf_load_stackoverflow) 1975-02-10

Family

ID=12604050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48041281A Pending JPS5012959A (enrdf_load_stackoverflow) 1973-04-13 1973-04-13

Country Status (1)

Country Link
JP (1) JPS5012959A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023067681A1 (ja) * 2021-10-19 2023-04-27 株式会社日立ハイテク 荷電粒子線装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023067681A1 (ja) * 2021-10-19 2023-04-27 株式会社日立ハイテク 荷電粒子線装置
JPWO2023067681A1 (enrdf_load_stackoverflow) * 2021-10-19 2023-04-27

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