JPS50125451U - - Google Patents

Info

Publication number
JPS50125451U
JPS50125451U JP3516874U JP3516874U JPS50125451U JP S50125451 U JPS50125451 U JP S50125451U JP 3516874 U JP3516874 U JP 3516874U JP 3516874 U JP3516874 U JP 3516874U JP S50125451 U JPS50125451 U JP S50125451U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3516874U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3516874U priority Critical patent/JPS50125451U/ja
Publication of JPS50125451U publication Critical patent/JPS50125451U/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP3516874U 1974-03-29 1974-03-29 Pending JPS50125451U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3516874U JPS50125451U (de) 1974-03-29 1974-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3516874U JPS50125451U (de) 1974-03-29 1974-03-29

Publications (1)

Publication Number Publication Date
JPS50125451U true JPS50125451U (de) 1975-10-15

Family

ID=28151199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3516874U Pending JPS50125451U (de) 1974-03-29 1974-03-29

Country Status (1)

Country Link
JP (1) JPS50125451U (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864021A (ja) * 1981-10-14 1983-04-16 Hitachi Ltd 連続製膜装置
JP2018529014A (ja) * 2015-09-21 2018-10-04 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 堆積速度を測定するための測定アセンブリ及びその方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4116187Y1 (de) * 1964-12-23 1966-07-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4116187Y1 (de) * 1964-12-23 1966-07-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864021A (ja) * 1981-10-14 1983-04-16 Hitachi Ltd 連続製膜装置
JP2018529014A (ja) * 2015-09-21 2018-10-04 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 堆積速度を測定するための測定アセンブリ及びその方法

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