JPS50123274A - - Google Patents

Info

Publication number
JPS50123274A
JPS50123274A JP3123074A JP3123074A JPS50123274A JP S50123274 A JPS50123274 A JP S50123274A JP 3123074 A JP3123074 A JP 3123074A JP 3123074 A JP3123074 A JP 3123074A JP S50123274 A JPS50123274 A JP S50123274A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3123074A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3123074A priority Critical patent/JPS50123274A/ja
Publication of JPS50123274A publication Critical patent/JPS50123274A/ja
Pending legal-status Critical Current

Links

JP3123074A 1974-03-15 1974-03-15 Pending JPS50123274A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3123074A JPS50123274A (en) 1974-03-15 1974-03-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3123074A JPS50123274A (en) 1974-03-15 1974-03-15

Publications (1)

Publication Number Publication Date
JPS50123274A true JPS50123274A (en) 1975-09-27

Family

ID=12325602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3123074A Pending JPS50123274A (en) 1974-03-15 1974-03-15

Country Status (1)

Country Link
JP (1) JPS50123274A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550641A (en) * 1978-10-05 1980-04-12 Nec Corp Semiconductor device
JPS5557269A (en) * 1978-10-23 1980-04-26 Matsushita Electric Ind Co Ltd Battery
JPS5619638A (en) * 1979-07-25 1981-02-24 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS62290152A (en) * 1977-01-26 1987-12-17 エスジーエス―トムソン マイクロエレクトロニクス,インコーポレイテッド Manufacture of semiconductor device
US6396078B1 (en) 1995-06-20 2002-05-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device with a tapered hole formed using multiple layers with different etching rates

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62290152A (en) * 1977-01-26 1987-12-17 エスジーエス―トムソン マイクロエレクトロニクス,インコーポレイテッド Manufacture of semiconductor device
JPH0362300B2 (en) * 1977-01-26 1991-09-25 Mostek Corp
JPS5550641A (en) * 1978-10-05 1980-04-12 Nec Corp Semiconductor device
JPS5557269A (en) * 1978-10-23 1980-04-26 Matsushita Electric Ind Co Ltd Battery
JPS6149791B2 (en) * 1978-10-23 1986-10-31 Matsushita Electric Ind Co Ltd
JPS5619638A (en) * 1979-07-25 1981-02-24 Nec Home Electronics Ltd Manufacture of semiconductor device
US6396078B1 (en) 1995-06-20 2002-05-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device with a tapered hole formed using multiple layers with different etching rates
US6593235B2 (en) 1995-06-20 2003-07-15 Semiconductor Energy Laboratory Co., Ltd Semiconductor device with a tapered hole formed using multiple layers with different etching rates

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