JPS50122880A - - Google Patents

Info

Publication number
JPS50122880A
JPS50122880A JP49029357A JP2935774A JPS50122880A JP S50122880 A JPS50122880 A JP S50122880A JP 49029357 A JP49029357 A JP 49029357A JP 2935774 A JP2935774 A JP 2935774A JP S50122880 A JPS50122880 A JP S50122880A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49029357A
Other languages
Japanese (ja)
Other versions
JPS5730295B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2935774A priority Critical patent/JPS5730295B2/ja
Publication of JPS50122880A publication Critical patent/JPS50122880A/ja
Publication of JPS5730295B2 publication Critical patent/JPS5730295B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Wire Bonding (AREA)
  • Control Of Position Or Direction (AREA)
  • Image Analysis (AREA)
JP2935774A 1974-03-13 1974-03-13 Expired JPS5730295B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2935774A JPS5730295B2 (enrdf_load_stackoverflow) 1974-03-13 1974-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2935774A JPS5730295B2 (enrdf_load_stackoverflow) 1974-03-13 1974-03-13

Publications (2)

Publication Number Publication Date
JPS50122880A true JPS50122880A (enrdf_load_stackoverflow) 1975-09-26
JPS5730295B2 JPS5730295B2 (enrdf_load_stackoverflow) 1982-06-28

Family

ID=12273935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2935774A Expired JPS5730295B2 (enrdf_load_stackoverflow) 1974-03-13 1974-03-13

Country Status (1)

Country Link
JP (1) JPS5730295B2 (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364180A (en) * 1976-11-19 1978-06-08 Sanyo Electric Co Device for correcting position
JPS57145066U (enrdf_load_stackoverflow) * 1981-03-06 1982-09-11
JPS60214910A (ja) * 1985-03-11 1985-10-28 株式会社日立製作所 ダイシング装置
JPS6235640A (ja) * 1985-08-09 1987-02-16 Nec Kyushu Ltd 半導体基板のプリアライメント機構
JP2007218778A (ja) * 2006-02-17 2007-08-30 Yamatake Corp 位置検出方法および位置合わせ方法
JP2008082748A (ja) * 2006-09-26 2008-04-10 Yamatake Corp エッジセンサ、位置検出方法および位置合わせ方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249990U (enrdf_load_stackoverflow) * 1988-09-29 1990-04-06

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364180A (en) * 1976-11-19 1978-06-08 Sanyo Electric Co Device for correcting position
JPS57145066U (enrdf_load_stackoverflow) * 1981-03-06 1982-09-11
JPS60214910A (ja) * 1985-03-11 1985-10-28 株式会社日立製作所 ダイシング装置
JPS6235640A (ja) * 1985-08-09 1987-02-16 Nec Kyushu Ltd 半導体基板のプリアライメント機構
JP2007218778A (ja) * 2006-02-17 2007-08-30 Yamatake Corp 位置検出方法および位置合わせ方法
JP2008082748A (ja) * 2006-09-26 2008-04-10 Yamatake Corp エッジセンサ、位置検出方法および位置合わせ方法

Also Published As

Publication number Publication date
JPS5730295B2 (enrdf_load_stackoverflow) 1982-06-28

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