JPS50122878A - - Google Patents
Info
- Publication number
- JPS50122878A JPS50122878A JP2938474A JP2938474A JPS50122878A JP S50122878 A JPS50122878 A JP S50122878A JP 2938474 A JP2938474 A JP 2938474A JP 2938474 A JP2938474 A JP 2938474A JP S50122878 A JPS50122878 A JP S50122878A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2938474A JPS50122878A (es) | 1974-03-14 | 1974-03-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2938474A JPS50122878A (es) | 1974-03-14 | 1974-03-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS50122878A true JPS50122878A (es) | 1975-09-26 |
Family
ID=12274631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2938474A Pending JPS50122878A (es) | 1974-03-14 | 1974-03-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS50122878A (es) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5469090A (en) * | 1977-11-11 | 1979-06-02 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS54109387A (en) * | 1978-02-15 | 1979-08-27 | Hitachi Ltd | Etching method |
JPH06302561A (ja) * | 1992-06-26 | 1994-10-28 | Nec Corp | ドライエッチング方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4943844A (es) * | 1972-09-01 | 1974-04-25 |
-
1974
- 1974-03-14 JP JP2938474A patent/JPS50122878A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4943844A (es) * | 1972-09-01 | 1974-04-25 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5469090A (en) * | 1977-11-11 | 1979-06-02 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS54109387A (en) * | 1978-02-15 | 1979-08-27 | Hitachi Ltd | Etching method |
JPS6255692B2 (es) * | 1978-02-15 | 1987-11-20 | Hitachi Ltd | |
JPH06302561A (ja) * | 1992-06-26 | 1994-10-28 | Nec Corp | ドライエッチング方法 |