JPS50122878A - - Google Patents

Info

Publication number
JPS50122878A
JPS50122878A JP2938474A JP2938474A JPS50122878A JP S50122878 A JPS50122878 A JP S50122878A JP 2938474 A JP2938474 A JP 2938474A JP 2938474 A JP2938474 A JP 2938474A JP S50122878 A JPS50122878 A JP S50122878A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2938474A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2938474A priority Critical patent/JPS50122878A/ja
Publication of JPS50122878A publication Critical patent/JPS50122878A/ja
Pending legal-status Critical Current

Links

JP2938474A 1974-03-14 1974-03-14 Pending JPS50122878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2938474A JPS50122878A (en) 1974-03-14 1974-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2938474A JPS50122878A (en) 1974-03-14 1974-03-14

Publications (1)

Publication Number Publication Date
JPS50122878A true JPS50122878A (en) 1975-09-26

Family

ID=12274631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2938474A Pending JPS50122878A (en) 1974-03-14 1974-03-14

Country Status (1)

Country Link
JP (1) JPS50122878A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5469090A (en) * 1977-11-11 1979-06-02 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS54109387A (en) * 1978-02-15 1979-08-27 Hitachi Ltd Etching method
JPH06302561A (en) * 1992-06-26 1994-10-28 Nec Corp Dry-etching method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4943844A (en) * 1972-09-01 1974-04-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4943844A (en) * 1972-09-01 1974-04-25

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5469090A (en) * 1977-11-11 1979-06-02 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS54109387A (en) * 1978-02-15 1979-08-27 Hitachi Ltd Etching method
JPS6255692B2 (en) * 1978-02-15 1987-11-20 Hitachi Ltd
JPH06302561A (en) * 1992-06-26 1994-10-28 Nec Corp Dry-etching method

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