JPS50120978A - - Google Patents

Info

Publication number
JPS50120978A
JPS50120978A JP2826074A JP2826074A JPS50120978A JP S50120978 A JPS50120978 A JP S50120978A JP 2826074 A JP2826074 A JP 2826074A JP 2826074 A JP2826074 A JP 2826074A JP S50120978 A JPS50120978 A JP S50120978A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2826074A
Other languages
Japanese (ja)
Other versions
JPS5850016B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49028260A priority Critical patent/JPS5850016B2/ja
Publication of JPS50120978A publication Critical patent/JPS50120978A/ja
Publication of JPS5850016B2 publication Critical patent/JPS5850016B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP49028260A 1974-03-11 1974-03-11 ハンドウタイキバン ノ センタクエツチングホウ Expired JPS5850016B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49028260A JPS5850016B2 (ja) 1974-03-11 1974-03-11 ハンドウタイキバン ノ センタクエツチングホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49028260A JPS5850016B2 (ja) 1974-03-11 1974-03-11 ハンドウタイキバン ノ センタクエツチングホウ

Publications (2)

Publication Number Publication Date
JPS50120978A true JPS50120978A (nl) 1975-09-22
JPS5850016B2 JPS5850016B2 (ja) 1983-11-08

Family

ID=12243586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49028260A Expired JPS5850016B2 (ja) 1974-03-11 1974-03-11 ハンドウタイキバン ノ センタクエツチングホウ

Country Status (1)

Country Link
JP (1) JPS5850016B2 (nl)

Also Published As

Publication number Publication date
JPS5850016B2 (ja) 1983-11-08

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