JPS50120978A - - Google Patents
Info
- Publication number
- JPS50120978A JPS50120978A JP2826074A JP2826074A JPS50120978A JP S50120978 A JPS50120978 A JP S50120978A JP 2826074 A JP2826074 A JP 2826074A JP 2826074 A JP2826074 A JP 2826074A JP S50120978 A JPS50120978 A JP S50120978A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49028260A JPS5850016B2 (ja) | 1974-03-11 | 1974-03-11 | ハンドウタイキバン ノ センタクエツチングホウ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49028260A JPS5850016B2 (ja) | 1974-03-11 | 1974-03-11 | ハンドウタイキバン ノ センタクエツチングホウ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50120978A true JPS50120978A (de) | 1975-09-22 |
| JPS5850016B2 JPS5850016B2 (ja) | 1983-11-08 |
Family
ID=12243586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49028260A Expired JPS5850016B2 (ja) | 1974-03-11 | 1974-03-11 | ハンドウタイキバン ノ センタクエツチングホウ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5850016B2 (de) |
-
1974
- 1974-03-11 JP JP49028260A patent/JPS5850016B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5850016B2 (ja) | 1983-11-08 |