JPS50118977A - - Google Patents

Info

Publication number
JPS50118977A
JPS50118977A JP2494574A JP2494574A JPS50118977A JP S50118977 A JPS50118977 A JP S50118977A JP 2494574 A JP2494574 A JP 2494574A JP 2494574 A JP2494574 A JP 2494574A JP S50118977 A JPS50118977 A JP S50118977A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2494574A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2494574A priority Critical patent/JPS50118977A/ja
Publication of JPS50118977A publication Critical patent/JPS50118977A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP2494574A 1974-03-02 1974-03-02 Pending JPS50118977A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2494574A JPS50118977A (zh) 1974-03-02 1974-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2494574A JPS50118977A (zh) 1974-03-02 1974-03-02

Publications (1)

Publication Number Publication Date
JPS50118977A true JPS50118977A (zh) 1975-09-18

Family

ID=12152145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2494574A Pending JPS50118977A (zh) 1974-03-02 1974-03-02

Country Status (1)

Country Link
JP (1) JPS50118977A (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713737A (en) * 1980-06-27 1982-01-23 Shunpei Yamazaki Plasma vapor-phase method
JPS584921A (ja) * 1981-06-30 1983-01-12 Fujitsu Ltd 反応管の洗浄方法
JPS5821826A (ja) * 1981-07-31 1983-02-08 Seiko Epson Corp 半導体製造装置の堆積物除去方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DENKI KAGAKU=1973 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713737A (en) * 1980-06-27 1982-01-23 Shunpei Yamazaki Plasma vapor-phase method
JPS584921A (ja) * 1981-06-30 1983-01-12 Fujitsu Ltd 反応管の洗浄方法
JPS5821826A (ja) * 1981-07-31 1983-02-08 Seiko Epson Corp 半導体製造装置の堆積物除去方法
JPS6359533B2 (zh) * 1981-07-31 1988-11-21

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