JPS50118659A - - Google Patents
Info
- Publication number
- JPS50118659A JPS50118659A JP49024363A JP2436374A JPS50118659A JP S50118659 A JPS50118659 A JP S50118659A JP 49024363 A JP49024363 A JP 49024363A JP 2436374 A JP2436374 A JP 2436374A JP S50118659 A JPS50118659 A JP S50118659A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49024363A JPS5741062B2 (https=) | 1974-03-01 | 1974-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49024363A JPS5741062B2 (https=) | 1974-03-01 | 1974-03-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50118659A true JPS50118659A (https=) | 1975-09-17 |
| JPS5741062B2 JPS5741062B2 (https=) | 1982-09-01 |
Family
ID=12136102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49024363A Expired JPS5741062B2 (https=) | 1974-03-01 | 1974-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5741062B2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216160A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Electron beam detection device |
| JPH01304647A (ja) * | 1988-06-01 | 1989-12-08 | Sanyuu Denshi Kk | 反射電子検出装置 |
| JPH0215545A (ja) * | 1988-07-01 | 1990-01-19 | Hitachi Ltd | Ｘ線マスクの欠陥検査方法及びその装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS506758U (https=) * | 1973-05-18 | 1975-01-23 |
-
1974
- 1974-03-01 JP JP49024363A patent/JPS5741062B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS506758U (https=) * | 1973-05-18 | 1975-01-23 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216160A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Electron beam detection device |
| JPH01304647A (ja) * | 1988-06-01 | 1989-12-08 | Sanyuu Denshi Kk | 反射電子検出装置 |
| JPH0215545A (ja) * | 1988-07-01 | 1990-01-19 | Hitachi Ltd | Ｘ線マスクの欠陥検査方法及びその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5741062B2 (https=) | 1982-09-01 |