JPS50117374A - - Google Patents
Info
- Publication number
- JPS50117374A JPS50117374A JP2404174A JP2404174A JPS50117374A JP S50117374 A JPS50117374 A JP S50117374A JP 2404174 A JP2404174 A JP 2404174A JP 2404174 A JP2404174 A JP 2404174A JP S50117374 A JPS50117374 A JP S50117374A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2404174A JPS50117374A (ja) | 1974-02-28 | 1974-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2404174A JPS50117374A (ja) | 1974-02-28 | 1974-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50117374A true JPS50117374A (ja) | 1975-09-13 |
Family
ID=12127394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2404174A Pending JPS50117374A (ja) | 1974-02-28 | 1974-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50117374A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05326430A (ja) * | 1992-03-26 | 1993-12-10 | Semiconductor Energy Lab Co Ltd | レーザー処理方法およびレーザー処理装置 |
| US6358784B1 (en) | 1992-03-26 | 2002-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Process for laser processing and apparatus for use in the same |
| JP2019135733A (ja) * | 2018-02-05 | 2019-08-15 | 株式会社Ｓｃｒｅｅｎホールディングス | 熱処理方法 |
| JP2021007160A (ja) * | 2016-12-12 | 2021-01-21 | 株式会社Ｓｃｒｅｅｎホールディングス | ドーパント導入方法および熱処理方法 |
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1974
- 1974-02-28 JP JP2404174A patent/JPS50117374A/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05326430A (ja) * | 1992-03-26 | 1993-12-10 | Semiconductor Energy Lab Co Ltd | レーザー処理方法およびレーザー処理装置 |
| US6358784B1 (en) | 1992-03-26 | 2002-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Process for laser processing and apparatus for use in the same |
| US6655767B2 (en) | 1992-03-26 | 2003-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Active matrix display device |
| US7169657B2 (en) | 1992-03-26 | 2007-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Process for laser processing and apparatus for use in the same |
| US7781271B2 (en) | 1992-03-26 | 2010-08-24 | Semiconductor Energy Laboratory Co., Ltd. | Process for laser processing and apparatus for use in the same |
| JP2021007160A (ja) * | 2016-12-12 | 2021-01-21 | 株式会社Ｓｃｒｅｅｎホールディングス | ドーパント導入方法および熱処理方法 |
| JP2019135733A (ja) * | 2018-02-05 | 2019-08-15 | 株式会社Ｓｃｒｅｅｎホールディングス | 熱処理方法 |