JPS5011666A - - Google Patents
Info
- Publication number
- JPS5011666A JPS5011666A JP6085273A JP6085273A JPS5011666A JP S5011666 A JPS5011666 A JP S5011666A JP 6085273 A JP6085273 A JP 6085273A JP 6085273 A JP6085273 A JP 6085273A JP S5011666 A JPS5011666 A JP S5011666A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6085273A JPS5011666A (enExample) | 1973-06-01 | 1973-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6085273A JPS5011666A (enExample) | 1973-06-01 | 1973-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5011666A true JPS5011666A (enExample) | 1975-02-06 |
Family
ID=13154313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6085273A Pending JPS5011666A (enExample) | 1973-06-01 | 1973-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5011666A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52147069A (en) * | 1976-06-01 | 1977-12-07 | Oki Electric Ind Co Ltd | Production of high quality masks |
| JPS5415887U (enExample) * | 1977-07-01 | 1979-02-01 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3317320A (en) * | 1964-01-02 | 1967-05-02 | Bendix Corp | Duo resist process |
-
1973
- 1973-06-01 JP JP6085273A patent/JPS5011666A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3317320A (en) * | 1964-01-02 | 1967-05-02 | Bendix Corp | Duo resist process |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52147069A (en) * | 1976-06-01 | 1977-12-07 | Oki Electric Ind Co Ltd | Production of high quality masks |
| JPS5415887U (enExample) * | 1977-07-01 | 1979-02-01 |