JPS50116334A - - Google Patents
Info
- Publication number
- JPS50116334A JPS50116334A JP2109074A JP2109074A JPS50116334A JP S50116334 A JPS50116334 A JP S50116334A JP 2109074 A JP2109074 A JP 2109074A JP 2109074 A JP2109074 A JP 2109074A JP S50116334 A JPS50116334 A JP S50116334A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49021090A JPS5759305B2 (en) | 1974-02-21 | 1974-02-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49021090A JPS5759305B2 (en) | 1974-02-21 | 1974-02-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50116334A true JPS50116334A (en) | 1975-09-11 |
JPS5759305B2 JPS5759305B2 (en) | 1982-12-14 |
Family
ID=12045161
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP49021090A Expired JPS5759305B2 (en) | 1974-02-21 | 1974-02-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5759305B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51106642A (en) * | 1975-03-17 | 1976-09-21 | Matsushita Electric Ind Co Ltd | IONPUREETEINGUSOCHI |
-
1974
- 1974-02-21 JP JP49021090A patent/JPS5759305B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51106642A (en) * | 1975-03-17 | 1976-09-21 | Matsushita Electric Ind Co Ltd | IONPUREETEINGUSOCHI |
Also Published As
Publication number | Publication date |
---|---|
JPS5759305B2 (en) | 1982-12-14 |