JPS5759305B2 - - Google Patents
Info
- Publication number
- JPS5759305B2 JPS5759305B2 JP49021090A JP2109074A JPS5759305B2 JP S5759305 B2 JPS5759305 B2 JP S5759305B2 JP 49021090 A JP49021090 A JP 49021090A JP 2109074 A JP2109074 A JP 2109074A JP S5759305 B2 JPS5759305 B2 JP S5759305B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49021090A JPS5759305B2 (ja) | 1974-02-21 | 1974-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49021090A JPS5759305B2 (ja) | 1974-02-21 | 1974-02-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50116334A JPS50116334A (ja) | 1975-09-11 |
| JPS5759305B2 true JPS5759305B2 (ja) | 1982-12-14 |
Family
ID=12045161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49021090A Expired JPS5759305B2 (ja) | 1974-02-21 | 1974-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5759305B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51106642A (ja) * | 1975-03-17 | 1976-09-21 | Matsushita Electric Ind Co Ltd | Ionpureeteingusochi |
-
1974
- 1974-02-21 JP JP49021090A patent/JPS5759305B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50116334A (ja) | 1975-09-11 |