JPS50115971A - - Google Patents
Info
- Publication number
- JPS50115971A JPS50115971A JP2057974A JP2057974A JPS50115971A JP S50115971 A JPS50115971 A JP S50115971A JP 2057974 A JP2057974 A JP 2057974A JP 2057974 A JP2057974 A JP 2057974A JP S50115971 A JPS50115971 A JP S50115971A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2057974A JPS5311424B2 (ja) | 1974-02-22 | 1974-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2057974A JPS5311424B2 (ja) | 1974-02-22 | 1974-02-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50115971A true JPS50115971A (ja) | 1975-09-10 |
| JPS5311424B2 JPS5311424B2 (ja) | 1978-04-21 |
Family
ID=12031107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2057974A Expired JPS5311424B2 (ja) | 1974-02-22 | 1974-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5311424B2 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01315712A (ja) * | 1988-06-16 | 1989-12-20 | Yotaro Hatamura | マイクロマニピユレータ |
| JPH08257838A (ja) * | 1995-03-24 | 1996-10-08 | Jeol Ltd | 微細加工方法および装置 |
| WO2001021526A1 (fr) * | 1999-09-24 | 2001-03-29 | Japan Science And Technology Corporation | Procede de micromanipulation |
| JP2009245952A (ja) * | 2009-07-27 | 2009-10-22 | Hitachi Ltd | 荷電粒子線装置 |
-
1974
- 1974-02-22 JP JP2057974A patent/JPS5311424B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01315712A (ja) * | 1988-06-16 | 1989-12-20 | Yotaro Hatamura | マイクロマニピユレータ |
| JPH08257838A (ja) * | 1995-03-24 | 1996-10-08 | Jeol Ltd | 微細加工方法および装置 |
| WO2001021526A1 (fr) * | 1999-09-24 | 2001-03-29 | Japan Science And Technology Corporation | Procede de micromanipulation |
| US6580076B1 (en) | 1999-09-24 | 2003-06-17 | Japan Science And Technology Corporation | Micro-manipulation method |
| JP2009245952A (ja) * | 2009-07-27 | 2009-10-22 | Hitachi Ltd | 荷電粒子線装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5311424B2 (ja) | 1978-04-21 |