JPS50115827A - - Google Patents
Info
- Publication number
- JPS50115827A JPS50115827A JP49020487A JP2048774A JPS50115827A JP S50115827 A JPS50115827 A JP S50115827A JP 49020487 A JP49020487 A JP 49020487A JP 2048774 A JP2048774 A JP 2048774A JP S50115827 A JPS50115827 A JP S50115827A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49020487A JPS5746214B2 (https=) | 1974-02-22 | 1974-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49020487A JPS5746214B2 (https=) | 1974-02-22 | 1974-02-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50115827A true JPS50115827A (https=) | 1975-09-10 |
| JPS5746214B2 JPS5746214B2 (https=) | 1982-10-01 |
Family
ID=12028486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49020487A Expired JPS5746214B2 (https=) | 1974-02-22 | 1974-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5746214B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS542072A (en) * | 1977-06-07 | 1979-01-09 | Oki Electric Ind Co Ltd | Manufacture for semiconductor device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS498182A (https=) * | 1972-05-10 | 1974-01-24 |
-
1974
- 1974-02-22 JP JP49020487A patent/JPS5746214B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS498182A (https=) * | 1972-05-10 | 1974-01-24 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS542072A (en) * | 1977-06-07 | 1979-01-09 | Oki Electric Ind Co Ltd | Manufacture for semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5746214B2 (https=) | 1982-10-01 |