JPS50115827A - - Google Patents

Info

Publication number
JPS50115827A
JPS50115827A JP49020487A JP2048774A JPS50115827A JP S50115827 A JPS50115827 A JP S50115827A JP 49020487 A JP49020487 A JP 49020487A JP 2048774 A JP2048774 A JP 2048774A JP S50115827 A JPS50115827 A JP S50115827A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49020487A
Other languages
Japanese (ja)
Other versions
JPS5746214B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49020487A priority Critical patent/JPS5746214B2/ja
Publication of JPS50115827A publication Critical patent/JPS50115827A/ja
Publication of JPS5746214B2 publication Critical patent/JPS5746214B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP49020487A 1974-02-22 1974-02-22 Expired JPS5746214B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49020487A JPS5746214B2 (cg-RX-API-DMAC7.html) 1974-02-22 1974-02-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49020487A JPS5746214B2 (cg-RX-API-DMAC7.html) 1974-02-22 1974-02-22

Publications (2)

Publication Number Publication Date
JPS50115827A true JPS50115827A (cg-RX-API-DMAC7.html) 1975-09-10
JPS5746214B2 JPS5746214B2 (cg-RX-API-DMAC7.html) 1982-10-01

Family

ID=12028486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49020487A Expired JPS5746214B2 (cg-RX-API-DMAC7.html) 1974-02-22 1974-02-22

Country Status (1)

Country Link
JP (1) JPS5746214B2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542072A (en) * 1977-06-07 1979-01-09 Oki Electric Ind Co Ltd Manufacture for semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498182A (cg-RX-API-DMAC7.html) * 1972-05-10 1974-01-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498182A (cg-RX-API-DMAC7.html) * 1972-05-10 1974-01-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542072A (en) * 1977-06-07 1979-01-09 Oki Electric Ind Co Ltd Manufacture for semiconductor device

Also Published As

Publication number Publication date
JPS5746214B2 (cg-RX-API-DMAC7.html) 1982-10-01

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