JPS5011453A - - Google Patents
Info
- Publication number
- JPS5011453A JPS5011453A JP6087173A JP6087173A JPS5011453A JP S5011453 A JPS5011453 A JP S5011453A JP 6087173 A JP6087173 A JP 6087173A JP 6087173 A JP6087173 A JP 6087173A JP S5011453 A JPS5011453 A JP S5011453A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6087173A JPS5011453A (en) | 1973-06-01 | 1973-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6087173A JPS5011453A (en) | 1973-06-01 | 1973-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5011453A true JPS5011453A (en) | 1975-02-05 |
Family
ID=13154867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6087173A Pending JPS5011453A (en) | 1973-06-01 | 1973-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5011453A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS498579A (en) * | 1972-05-22 | 1974-01-25 | ||
| US4535267A (en) * | 1982-11-11 | 1985-08-13 | Saes Getters S.P.A. | Getter assembly with improved support |
| US4553065A (en) * | 1982-11-23 | 1985-11-12 | Saes Getters S.P.A. | Getter assembly with improved support |
| JPH04340404A (en) * | 1990-10-30 | 1992-11-26 | Internatl Business Mach Corp <Ibm> | Material processing method and material surface monitoring apparatus |
-
1973
- 1973-06-01 JP JP6087173A patent/JPS5011453A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS498579A (en) * | 1972-05-22 | 1974-01-25 | ||
| US4535267A (en) * | 1982-11-11 | 1985-08-13 | Saes Getters S.P.A. | Getter assembly with improved support |
| US4553065A (en) * | 1982-11-23 | 1985-11-12 | Saes Getters S.P.A. | Getter assembly with improved support |
| JPH04340404A (en) * | 1990-10-30 | 1992-11-26 | Internatl Business Mach Corp <Ibm> | Material processing method and material surface monitoring apparatus |