JPS50109672A - - Google Patents

Info

Publication number
JPS50109672A
JPS50109672A JP1331274A JP1331274A JPS50109672A JP S50109672 A JPS50109672 A JP S50109672A JP 1331274 A JP1331274 A JP 1331274A JP 1331274 A JP1331274 A JP 1331274A JP S50109672 A JPS50109672 A JP S50109672A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1331274A
Other languages
Japanese (ja)
Other versions
JPS5322031B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1331274A priority Critical patent/JPS5322031B2/ja
Publication of JPS50109672A publication Critical patent/JPS50109672A/ja
Publication of JPS5322031B2 publication Critical patent/JPS5322031B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1331274A 1974-02-02 1974-02-02 Expired JPS5322031B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1331274A JPS5322031B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-02 1974-02-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1331274A JPS5322031B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-02 1974-02-02

Publications (2)

Publication Number Publication Date
JPS50109672A true JPS50109672A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-08-28
JPS5322031B2 JPS5322031B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-07-06

Family

ID=11829642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1331274A Expired JPS5322031B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-02 1974-02-02

Country Status (1)

Country Link
JP (1) JPS5322031B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340281A (en) * 1976-09-27 1978-04-12 Konishiroku Photo Ind Co Ltd Photo mask material and manufacturtof it
JPS5672446A (en) * 1979-11-20 1981-06-16 Fujitsu Ltd Production of photomask
JPS56125743A (en) * 1980-03-07 1981-10-02 Konishiroku Photo Ind Co Ltd Base material for photomask
JPS58169150A (ja) * 1982-03-30 1983-10-05 Fujitsu Ltd フオトマスクの製造方法
JPS59119353A (ja) * 1982-12-27 1984-07-10 Hoya Corp フオトマスクブランク

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999034A (en) * 1960-10-21 1961-09-05 Wenczler & Heidenhain Method of manufacture of line plates, scales, and the like
JPS493231A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-04-22 1974-01-12
JPS493232A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-04-24 1974-01-12

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999034A (en) * 1960-10-21 1961-09-05 Wenczler & Heidenhain Method of manufacture of line plates, scales, and the like
JPS493231A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-04-22 1974-01-12
JPS493232A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-04-24 1974-01-12

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340281A (en) * 1976-09-27 1978-04-12 Konishiroku Photo Ind Co Ltd Photo mask material and manufacturtof it
JPS5672446A (en) * 1979-11-20 1981-06-16 Fujitsu Ltd Production of photomask
JPS56125743A (en) * 1980-03-07 1981-10-02 Konishiroku Photo Ind Co Ltd Base material for photomask
JPS58169150A (ja) * 1982-03-30 1983-10-05 Fujitsu Ltd フオトマスクの製造方法
JPS59119353A (ja) * 1982-12-27 1984-07-10 Hoya Corp フオトマスクブランク

Also Published As

Publication number Publication date
JPS5322031B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-07-06

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