JPS5322031B2 - - Google Patents
Info
- Publication number
- JPS5322031B2 JPS5322031B2 JP1331274A JP1331274A JPS5322031B2 JP S5322031 B2 JPS5322031 B2 JP S5322031B2 JP 1331274 A JP1331274 A JP 1331274A JP 1331274 A JP1331274 A JP 1331274A JP S5322031 B2 JPS5322031 B2 JP S5322031B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1331274A JPS5322031B2 (ja) | 1974-02-02 | 1974-02-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1331274A JPS5322031B2 (ja) | 1974-02-02 | 1974-02-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50109672A JPS50109672A (ja) | 1975-08-28 |
JPS5322031B2 true JPS5322031B2 (ja) | 1978-07-06 |
Family
ID=11829642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1331274A Expired JPS5322031B2 (ja) | 1974-02-02 | 1974-02-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5322031B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0227890B2 (ja) * | 1982-05-21 | 1990-06-20 | Hitachi Ltd |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5340281A (en) * | 1976-09-27 | 1978-04-12 | Konishiroku Photo Ind Co Ltd | Photo mask material and manufacturtof it |
JPS5672446A (en) * | 1979-11-20 | 1981-06-16 | Fujitsu Ltd | Production of photomask |
JPS56125743A (en) * | 1980-03-07 | 1981-10-02 | Konishiroku Photo Ind Co Ltd | Base material for photomask |
JPS58169150A (ja) * | 1982-03-30 | 1983-10-05 | Fujitsu Ltd | フオトマスクの製造方法 |
JPS59119353A (ja) * | 1982-12-27 | 1984-07-10 | Hoya Corp | フオトマスクブランク |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2999034A (en) * | 1960-10-21 | 1961-09-05 | Wenczler & Heidenhain | Method of manufacture of line plates, scales, and the like |
JPS493231A (ja) * | 1972-04-22 | 1974-01-12 | ||
JPS493232A (ja) * | 1972-04-24 | 1974-01-12 |
-
1974
- 1974-02-02 JP JP1331274A patent/JPS5322031B2/ja not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2999034A (en) * | 1960-10-21 | 1961-09-05 | Wenczler & Heidenhain | Method of manufacture of line plates, scales, and the like |
JPS493231A (ja) * | 1972-04-22 | 1974-01-12 | ||
JPS493232A (ja) * | 1972-04-24 | 1974-01-12 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0227890B2 (ja) * | 1982-05-21 | 1990-06-20 | Hitachi Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS50109672A (ja) | 1975-08-28 |