JPS5010962A - - Google Patents

Info

Publication number
JPS5010962A
JPS5010962A JP48058578A JP5857873A JPS5010962A JP S5010962 A JPS5010962 A JP S5010962A JP 48058578 A JP48058578 A JP 48058578A JP 5857873 A JP5857873 A JP 5857873A JP S5010962 A JPS5010962 A JP S5010962A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48058578A
Other languages
Japanese (ja)
Other versions
JPS5826167B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48058578A priority Critical patent/JPS5826167B2/en
Publication of JPS5010962A publication Critical patent/JPS5010962A/ja
Publication of JPS5826167B2 publication Critical patent/JPS5826167B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP48058578A 1973-05-28 1973-05-28 Silicon carbide manufacturing method Expired JPS5826167B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48058578A JPS5826167B2 (en) 1973-05-28 1973-05-28 Silicon carbide manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48058578A JPS5826167B2 (en) 1973-05-28 1973-05-28 Silicon carbide manufacturing method

Publications (2)

Publication Number Publication Date
JPS5010962A true JPS5010962A (en) 1975-02-04
JPS5826167B2 JPS5826167B2 (en) 1983-06-01

Family

ID=13088316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48058578A Expired JPS5826167B2 (en) 1973-05-28 1973-05-28 Silicon carbide manufacturing method

Country Status (1)

Country Link
JP (1) JPS5826167B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5874595A (en) * 1981-10-23 1983-05-06 Toshiba Ceramics Co Ltd Pulling up device for single-crystal silicon
JPS63157425A (en) * 1986-12-22 1988-06-30 Hitachi Electronics Eng Co Ltd Vapor phase reaction equipment
SG107565A1 (en) * 2000-09-01 2004-12-29 Uni Charm Corp Method and apparatus for opening continuous filaments

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5874595A (en) * 1981-10-23 1983-05-06 Toshiba Ceramics Co Ltd Pulling up device for single-crystal silicon
JPS63157425A (en) * 1986-12-22 1988-06-30 Hitachi Electronics Eng Co Ltd Vapor phase reaction equipment
SG107565A1 (en) * 2000-09-01 2004-12-29 Uni Charm Corp Method and apparatus for opening continuous filaments

Also Published As

Publication number Publication date
JPS5826167B2 (en) 1983-06-01

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