JPS50108184A - - Google Patents

Info

Publication number
JPS50108184A
JPS50108184A JP1481874A JP1481874A JPS50108184A JP S50108184 A JPS50108184 A JP S50108184A JP 1481874 A JP1481874 A JP 1481874A JP 1481874 A JP1481874 A JP 1481874A JP S50108184 A JPS50108184 A JP S50108184A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1481874A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1481874A priority Critical patent/JPS50108184A/ja
Publication of JPS50108184A publication Critical patent/JPS50108184A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP1481874A 1974-02-04 1974-02-04 Pending JPS50108184A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1481874A JPS50108184A (enrdf_load_stackoverflow) 1974-02-04 1974-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1481874A JPS50108184A (enrdf_load_stackoverflow) 1974-02-04 1974-02-04

Publications (1)

Publication Number Publication Date
JPS50108184A true JPS50108184A (enrdf_load_stackoverflow) 1975-08-26

Family

ID=11871609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1481874A Pending JPS50108184A (enrdf_load_stackoverflow) 1974-02-04 1974-02-04

Country Status (1)

Country Link
JP (1) JPS50108184A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52140267A (en) * 1976-05-19 1977-11-22 Nippon Telegr & Teleph Corp <Ntt> Vapor epitaxial crystal growing device
JPS5399762A (en) * 1977-02-12 1978-08-31 Futaba Denshi Kogyo Kk Device for producing compound semiconductor film
JPS57161060A (en) * 1981-03-30 1982-10-04 Inoue Japax Res Inc Ion working device
JPS5897825A (ja) * 1981-12-07 1983-06-10 Seiko Epson Corp イオン．ビ−ム．デポジシヨン法
JPS62229844A (ja) * 1986-03-31 1987-10-08 Toshiba Corp 薄膜堆積方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52140267A (en) * 1976-05-19 1977-11-22 Nippon Telegr & Teleph Corp <Ntt> Vapor epitaxial crystal growing device
JPS5399762A (en) * 1977-02-12 1978-08-31 Futaba Denshi Kogyo Kk Device for producing compound semiconductor film
JPS57161060A (en) * 1981-03-30 1982-10-04 Inoue Japax Res Inc Ion working device
JPS5897825A (ja) * 1981-12-07 1983-06-10 Seiko Epson Corp イオン．ビ−ム．デポジシヨン法
JPS62229844A (ja) * 1986-03-31 1987-10-08 Toshiba Corp 薄膜堆積方法

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