JPS5010787A - - Google Patents

Info

Publication number
JPS5010787A
JPS5010787A JP6253173A JP6253173A JPS5010787A JP S5010787 A JPS5010787 A JP S5010787A JP 6253173 A JP6253173 A JP 6253173A JP 6253173 A JP6253173 A JP 6253173A JP S5010787 A JPS5010787 A JP S5010787A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6253173A
Other versions
JPS5432438B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6253173A priority Critical patent/JPS5432438B2/ja
Publication of JPS5010787A publication Critical patent/JPS5010787A/ja
Publication of JPS5432438B2 publication Critical patent/JPS5432438B2/ja
Expired legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP6253173A 1973-06-05 1973-06-05 Expired JPS5432438B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6253173A JPS5432438B2 (ja) 1973-06-05 1973-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6253173A JPS5432438B2 (ja) 1973-06-05 1973-06-05

Publications (2)

Publication Number Publication Date
JPS5010787A true JPS5010787A (ja) 1975-02-04
JPS5432438B2 JPS5432438B2 (ja) 1979-10-15

Family

ID=13202864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6253173A Expired JPS5432438B2 (ja) 1973-06-05 1973-06-05

Country Status (1)

Country Link
JP (1) JPS5432438B2 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137443U (ja) * 1975-04-30 1976-11-06
JPS51142050U (ja) * 1975-05-08 1976-11-16
JPS5266757U (ja) * 1975-11-12 1977-05-17
JPS5265184A (en) * 1975-11-26 1977-05-30 Nippon Telegr & Teleph Corp <Ntt> Eqipment for simultaneous sputtering at both surface
JPS55134175A (en) * 1979-04-06 1980-10-18 Hitachi Ltd Microwave plasma etching unit
JPH03114092U (ja) * 1990-03-09 1991-11-22

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137443U (ja) * 1975-04-30 1976-11-06
JPS51142050U (ja) * 1975-05-08 1976-11-16
JPS5266757U (ja) * 1975-11-12 1977-05-17
JPS561724Y2 (ja) * 1975-11-12 1981-01-16
JPS5265184A (en) * 1975-11-26 1977-05-30 Nippon Telegr & Teleph Corp <Ntt> Eqipment for simultaneous sputtering at both surface
JPS55134175A (en) * 1979-04-06 1980-10-18 Hitachi Ltd Microwave plasma etching unit
JPS5617433B2 (ja) * 1979-04-06 1981-04-22
JPH03114092U (ja) * 1990-03-09 1991-11-22

Also Published As

Publication number Publication date
JPS5432438B2 (ja) 1979-10-15

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