JPS50103271A - - Google Patents
Info
- Publication number
- JPS50103271A JPS50103271A JP595474A JP595474A JPS50103271A JP S50103271 A JPS50103271 A JP S50103271A JP 595474 A JP595474 A JP 595474A JP 595474 A JP595474 A JP 595474A JP S50103271 A JPS50103271 A JP S50103271A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP595474A JPS604589B2 (ja) | 1974-01-11 | 1974-01-11 | 半導体ウエハの加熱処理方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP595474A JPS604589B2 (ja) | 1974-01-11 | 1974-01-11 | 半導体ウエハの加熱処理方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23321685A Division JPS6193620A (ja) | 1985-10-21 | 1985-10-21 | 半導体ウエハの加熱処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50103271A true JPS50103271A (ja) | 1975-08-15 |
JPS604589B2 JPS604589B2 (ja) | 1985-02-05 |
Family
ID=11625273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP595474A Expired JPS604589B2 (ja) | 1974-01-11 | 1974-01-11 | 半導体ウエハの加熱処理方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS604589B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6193620A (ja) * | 1985-10-21 | 1986-05-12 | Hitachi Ltd | 半導体ウエハの加熱処理方法 |
JPH03212933A (ja) * | 1990-01-18 | 1991-09-18 | Tokyo Electron Ltd | 熱処理方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0444638Y2 (ja) * | 1986-11-13 | 1992-10-21 |
-
1974
- 1974-01-11 JP JP595474A patent/JPS604589B2/ja not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6193620A (ja) * | 1985-10-21 | 1986-05-12 | Hitachi Ltd | 半導体ウエハの加熱処理方法 |
JPH045263B2 (ja) * | 1985-10-21 | 1992-01-30 | ||
JPH03212933A (ja) * | 1990-01-18 | 1991-09-18 | Tokyo Electron Ltd | 熱処理方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS604589B2 (ja) | 1985-02-05 |