JPS4999972A - - Google Patents

Info

Publication number
JPS4999972A
JPS4999972A JP1192173A JP1192173A JPS4999972A JP S4999972 A JPS4999972 A JP S4999972A JP 1192173 A JP1192173 A JP 1192173A JP 1192173 A JP1192173 A JP 1192173A JP S4999972 A JPS4999972 A JP S4999972A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1192173A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1192173A priority Critical patent/JPS4999972A/ja
Publication of JPS4999972A publication Critical patent/JPS4999972A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1192173A 1973-01-31 1973-01-31 Pending JPS4999972A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1192173A JPS4999972A (enrdf_load_stackoverflow) 1973-01-31 1973-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1192173A JPS4999972A (enrdf_load_stackoverflow) 1973-01-31 1973-01-31

Publications (1)

Publication Number Publication Date
JPS4999972A true JPS4999972A (enrdf_load_stackoverflow) 1974-09-20

Family

ID=11791141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1192173A Pending JPS4999972A (enrdf_load_stackoverflow) 1973-01-31 1973-01-31

Country Status (1)

Country Link
JP (1) JPS4999972A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54161343U (enrdf_load_stackoverflow) * 1978-04-28 1979-11-12
JPS6116365U (ja) * 1984-06-28 1986-01-30 三菱電機株式会社 薄膜蒸着装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54161343U (enrdf_load_stackoverflow) * 1978-04-28 1979-11-12
JPS6116365U (ja) * 1984-06-28 1986-01-30 三菱電機株式会社 薄膜蒸着装置

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