JPS499972A - - Google Patents
Info
- Publication number
- JPS499972A JPS499972A JP4897272A JP4897272A JPS499972A JP S499972 A JPS499972 A JP S499972A JP 4897272 A JP4897272 A JP 4897272A JP 4897272 A JP4897272 A JP 4897272A JP S499972 A JPS499972 A JP S499972A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4897272A JPS5132507B2 (en:Method) | 1972-05-17 | 1972-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4897272A JPS5132507B2 (en:Method) | 1972-05-17 | 1972-05-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS499972A true JPS499972A (en:Method) | 1974-01-29 |
| JPS5132507B2 JPS5132507B2 (en:Method) | 1976-09-13 |
Family
ID=12818171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4897272A Expired JPS5132507B2 (en:Method) | 1972-05-17 | 1972-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5132507B2 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6074517A (ja) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | スパツタリング装置 |
| JPS63194327A (ja) * | 1987-02-09 | 1988-08-11 | Nippon Inter Electronics Corp | 半導体装置の製造方法 |
| JPH0234918A (ja) * | 1988-07-25 | 1990-02-05 | Fujitsu Ltd | 半導体装置の製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56119905A (en) * | 1980-02-26 | 1981-09-19 | Teac Co | Multiple magnetic recording and reproducing device |
| JPS56124104A (en) * | 1980-02-29 | 1981-09-29 | Teac Co | Secret sound recording and reproducing device |
-
1972
- 1972-05-17 JP JP4897272A patent/JPS5132507B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6074517A (ja) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | スパツタリング装置 |
| JPS63194327A (ja) * | 1987-02-09 | 1988-08-11 | Nippon Inter Electronics Corp | 半導体装置の製造方法 |
| JPH0234918A (ja) * | 1988-07-25 | 1990-02-05 | Fujitsu Ltd | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5132507B2 (en:Method) | 1976-09-13 |