JPS4999086A - - Google Patents

Info

Publication number
JPS4999086A
JPS4999086A JP1025173A JP1025173A JPS4999086A JP S4999086 A JPS4999086 A JP S4999086A JP 1025173 A JP1025173 A JP 1025173A JP 1025173 A JP1025173 A JP 1025173A JP S4999086 A JPS4999086 A JP S4999086A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1025173A
Other languages
Japanese (ja)
Other versions
JPS5631540B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1025173A priority Critical patent/JPS5631540B2/ja
Publication of JPS4999086A publication Critical patent/JPS4999086A/ja
Publication of JPS5631540B2 publication Critical patent/JPS5631540B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1025173A 1973-01-26 1973-01-26 Expired JPS5631540B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1025173A JPS5631540B2 (enrdf_load_stackoverflow) 1973-01-26 1973-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1025173A JPS5631540B2 (enrdf_load_stackoverflow) 1973-01-26 1973-01-26

Publications (2)

Publication Number Publication Date
JPS4999086A true JPS4999086A (enrdf_load_stackoverflow) 1974-09-19
JPS5631540B2 JPS5631540B2 (enrdf_load_stackoverflow) 1981-07-22

Family

ID=11745080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1025173A Expired JPS5631540B2 (enrdf_load_stackoverflow) 1973-01-26 1973-01-26

Country Status (1)

Country Link
JP (1) JPS5631540B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138183A (en) * 1976-05-14 1977-11-18 Toshiba Corp Inspecting apparatus for flaw
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS61180128A (ja) * 1986-01-10 1986-08-12 Hitachi Ltd 物体表面検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4727988U (enrdf_load_stackoverflow) * 1971-04-19 1972-11-29
JPS4727987U (enrdf_load_stackoverflow) * 1971-04-19 1972-11-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4727988U (enrdf_load_stackoverflow) * 1971-04-19 1972-11-29
JPS4727987U (enrdf_load_stackoverflow) * 1971-04-19 1972-11-29

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138183A (en) * 1976-05-14 1977-11-18 Toshiba Corp Inspecting apparatus for flaw
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS61180128A (ja) * 1986-01-10 1986-08-12 Hitachi Ltd 物体表面検査装置

Also Published As

Publication number Publication date
JPS5631540B2 (enrdf_load_stackoverflow) 1981-07-22

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