JPS4998173A - - Google Patents
Info
- Publication number
- JPS4998173A JPS4998173A JP791473A JP791473A JPS4998173A JP S4998173 A JPS4998173 A JP S4998173A JP 791473 A JP791473 A JP 791473A JP 791473 A JP791473 A JP 791473A JP S4998173 A JPS4998173 A JP S4998173A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP791473A JPS5531986B2 (en) | 1973-01-19 | 1973-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP791473A JPS5531986B2 (en) | 1973-01-19 | 1973-01-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4998173A true JPS4998173A (en) | 1974-09-17 |
| JPS5531986B2 JPS5531986B2 (en) | 1980-08-22 |
Family
ID=11678796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP791473A Expired JPS5531986B2 (en) | 1973-01-19 | 1973-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5531986B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6081749A (en) * | 1983-10-12 | 1985-05-09 | Jeol Ltd | Ion beam device |
| JPS63166130A (en) * | 1986-12-27 | 1988-07-09 | Jeol Ltd | Electron-beam device having electric field radiation electron source |
| JPS63276856A (en) * | 1986-12-27 | 1988-11-15 | Jeol Ltd | Electron beam device having electric field radiating electron source |
| JP2008543014A (en) * | 2005-06-03 | 2008-11-27 | シーイービーティー・カンパニー・リミティッド | Ultra-small electron column with simple structure |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6340165B2 (en) * | 2013-04-25 | 2018-06-06 | 株式会社日立ハイテクノロジーズ | Electron gun, charged particle gun and charged particle beam apparatus using them |
-
1973
- 1973-01-19 JP JP791473A patent/JPS5531986B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6081749A (en) * | 1983-10-12 | 1985-05-09 | Jeol Ltd | Ion beam device |
| JPS63166130A (en) * | 1986-12-27 | 1988-07-09 | Jeol Ltd | Electron-beam device having electric field radiation electron source |
| JPS63276856A (en) * | 1986-12-27 | 1988-11-15 | Jeol Ltd | Electron beam device having electric field radiating electron source |
| JPH0576129B2 (en) * | 1986-12-27 | 1993-10-22 | Nippon Electron Optics Lab | |
| JP2008543014A (en) * | 2005-06-03 | 2008-11-27 | シーイービーティー・カンパニー・リミティッド | Ultra-small electron column with simple structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5531986B2 (en) | 1980-08-22 |