JPS4997690A - - Google Patents
Info
- Publication number
- JPS4997690A JPS4997690A JP48007911A JP791173A JPS4997690A JP S4997690 A JPS4997690 A JP S4997690A JP 48007911 A JP48007911 A JP 48007911A JP 791173 A JP791173 A JP 791173A JP S4997690 A JPS4997690 A JP S4997690A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48007911A JPS4997690A (en) | 1973-01-19 | 1973-01-19 | |
| US434061A US3930155A (en) | 1973-01-19 | 1974-01-17 | Ion microprobe analyser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48007911A JPS4997690A (en) | 1973-01-19 | 1973-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4997690A true JPS4997690A (en) | 1974-09-14 |
Family
ID=11678713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48007911A Pending JPS4997690A (en) | 1973-01-19 | 1973-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4997690A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6119043A (en) * | 1984-07-06 | 1986-01-27 | Nippon Telegr & Teleph Corp <Ntt> | Secondary ion mass spectrograph |
| JPS6286657A (en) * | 1985-10-11 | 1987-04-21 | Hitachi Ltd | Ion source for secondary ion mass spectrometer |
| JPS63170940A (en) * | 1987-12-02 | 1988-07-14 | Hitachi Ltd | Correction of device |
| JPS63296241A (en) * | 1987-12-02 | 1988-12-02 | Hitachi Ltd | Element correction device |
| JPS63301952A (en) * | 1986-12-26 | 1988-12-08 | Seiko Instr & Electronics Ltd | Method and device for repairing mask |
| US5071671A (en) * | 1984-02-28 | 1991-12-10 | Seiko Instruments Inc. | Process for forming pattern films |
-
1973
- 1973-01-19 JP JP48007911A patent/JPS4997690A/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5071671A (en) * | 1984-02-28 | 1991-12-10 | Seiko Instruments Inc. | Process for forming pattern films |
| JPS6119043A (en) * | 1984-07-06 | 1986-01-27 | Nippon Telegr & Teleph Corp <Ntt> | Secondary ion mass spectrograph |
| JPS6286657A (en) * | 1985-10-11 | 1987-04-21 | Hitachi Ltd | Ion source for secondary ion mass spectrometer |
| JPS63301952A (en) * | 1986-12-26 | 1988-12-08 | Seiko Instr & Electronics Ltd | Method and device for repairing mask |
| JPH0553259B2 (en) * | 1986-12-26 | 1993-08-09 | Seiko Instr & Electronics | |
| JPS63170940A (en) * | 1987-12-02 | 1988-07-14 | Hitachi Ltd | Correction of device |
| JPS63296241A (en) * | 1987-12-02 | 1988-12-02 | Hitachi Ltd | Element correction device |