JPS4995567A - - Google Patents
Info
- Publication number
- JPS4995567A JPS4995567A JP595173A JP595173A JPS4995567A JP S4995567 A JPS4995567 A JP S4995567A JP 595173 A JP595173 A JP 595173A JP 595173 A JP595173 A JP 595173A JP S4995567 A JPS4995567 A JP S4995567A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP595173A JPS4995567A (en) | 1973-01-12 | 1973-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP595173A JPS4995567A (en) | 1973-01-12 | 1973-01-12 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2303281A Division JPS5795623A (en) | 1981-02-20 | 1981-02-20 | Impurity source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4995567A true JPS4995567A (en) | 1974-09-10 |
Family
ID=11625187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP595173A Pending JPS4995567A (en) | 1973-01-12 | 1973-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4995567A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6024011A (en) * | 1983-06-08 | 1985-02-06 | ステンカ−・コ−ポレ−シヨン | Porous silicon nitride semiconductor dopant carrier |
| JPS6024010A (en) * | 1983-06-08 | 1985-02-06 | ステンカ−・コ−ポレ−シヨン | Porous semiconductor dopant carrier |
| JPS6042819A (en) * | 1983-06-08 | 1985-03-07 | ステンカ−・コ−ポレ−シヨン | Foam semiconductor doping agent carrier |
| JP2005286101A (en) * | 2004-03-30 | 2005-10-13 | Denki Kagaku Kogyo Kk | Fixing method of boron compound, and boron diffusing source |
-
1973
- 1973-01-12 JP JP595173A patent/JPS4995567A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6024011A (en) * | 1983-06-08 | 1985-02-06 | ステンカ−・コ−ポレ−シヨン | Porous silicon nitride semiconductor dopant carrier |
| JPS6024010A (en) * | 1983-06-08 | 1985-02-06 | ステンカ−・コ−ポレ−シヨン | Porous semiconductor dopant carrier |
| JPS6042819A (en) * | 1983-06-08 | 1985-03-07 | ステンカ−・コ−ポレ−シヨン | Foam semiconductor doping agent carrier |
| JP2005286101A (en) * | 2004-03-30 | 2005-10-13 | Denki Kagaku Kogyo Kk | Fixing method of boron compound, and boron diffusing source |