JPS4994267A - - Google Patents

Info

Publication number
JPS4994267A
JPS4994267A JP522873A JP522873A JPS4994267A JP S4994267 A JPS4994267 A JP S4994267A JP 522873 A JP522873 A JP 522873A JP 522873 A JP522873 A JP 522873A JP S4994267 A JPS4994267 A JP S4994267A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP522873A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP522873A priority Critical patent/JPS4994267A/ja
Publication of JPS4994267A publication Critical patent/JPS4994267A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Filters (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP522873A 1973-01-10 1973-01-10 Pending JPS4994267A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP522873A JPS4994267A (zh) 1973-01-10 1973-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP522873A JPS4994267A (zh) 1973-01-10 1973-01-10

Publications (1)

Publication Number Publication Date
JPS4994267A true JPS4994267A (zh) 1974-09-06

Family

ID=11605315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP522873A Pending JPS4994267A (zh) 1973-01-10 1973-01-10

Country Status (1)

Country Link
JP (1) JPS4994267A (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315087A (en) * 1976-07-27 1978-02-10 Oki Electric Ind Co Ltd Electrode formation method of semiconductor device
JPS54111285A (en) * 1978-02-20 1979-08-31 Nec Corp Production of semiconductor device
JPS5593225A (en) * 1979-01-10 1980-07-15 Hitachi Ltd Forming method of minute pattern
JPS5680133A (en) * 1979-12-06 1981-07-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Formation of pattern
JPS6038821A (ja) * 1983-08-12 1985-02-28 Hitachi Ltd エッチング方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040910A (zh) * 1973-08-15 1975-04-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040910A (zh) * 1973-08-15 1975-04-15

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315087A (en) * 1976-07-27 1978-02-10 Oki Electric Ind Co Ltd Electrode formation method of semiconductor device
JPS54111285A (en) * 1978-02-20 1979-08-31 Nec Corp Production of semiconductor device
JPS5593225A (en) * 1979-01-10 1980-07-15 Hitachi Ltd Forming method of minute pattern
JPS5680133A (en) * 1979-12-06 1981-07-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Formation of pattern
JPS6038821A (ja) * 1983-08-12 1985-02-28 Hitachi Ltd エッチング方法
JPH0455323B2 (zh) * 1983-08-12 1992-09-03 Hitachi Ltd

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