JPS4991241A - - Google Patents

Info

Publication number
JPS4991241A
JPS4991241A JP48140449A JP14044973A JPS4991241A JP S4991241 A JPS4991241 A JP S4991241A JP 48140449 A JP48140449 A JP 48140449A JP 14044973 A JP14044973 A JP 14044973A JP S4991241 A JPS4991241 A JP S4991241A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48140449A
Other versions
JPS5623163B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4991241A publication Critical patent/JPS4991241A/ja
Publication of JPS5623163B2 publication Critical patent/JPS5623163B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00Control of position or direction
    • G05D3/12Control of position or direction using feedback
    • G05D3/14Control of position or direction using feedback using an analogue comparing device
    • G05D3/1409Control of position or direction using feedback using an analogue comparing device with dc amplifier chain
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00Control of position or direction
    • G05D3/12Control of position or direction using feedback
    • G05D3/14Control of position or direction using feedback using an analogue comparing device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Automatic Focus Adjustment (AREA)
  • Control Of Position Or Direction (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Lasers (AREA)
JP14044973A 1972-12-18 1973-12-18 Expired JPS5623163B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1841272A CH561445A5 (ja) 1972-12-18 1972-12-18

Publications (2)

Publication Number Publication Date
JPS4991241A true JPS4991241A (ja) 1974-08-31
JPS5623163B2 JPS5623163B2 (ja) 1981-05-29

Family

ID=4432808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14044973A Expired JPS5623163B2 (ja) 1972-12-18 1973-12-18

Country Status (5)

Country Link
US (1) US3881107A (ja)
JP (1) JPS5623163B2 (ja)
CH (1) CH561445A5 (ja)
DE (1) DE2362289C2 (ja)
GB (1) GB1413698A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01183621A (ja) * 1988-01-18 1989-07-21 Olympus Optical Co Ltd 集光位置調節装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190829A (ja) * 1975-02-07 1976-08-09
US4161652A (en) * 1976-12-24 1979-07-17 Office National D'etudes Et De Recherches Aerospatiales System for optically aiming a laser beam on to a target
US4349732A (en) * 1980-01-07 1982-09-14 The Singer Company Laser spatial stabilization transmission system
US4355859A (en) * 1980-09-29 1982-10-26 Xerox Corporation Field replaceable laser apparatus for raster scanner
US4600185A (en) * 1983-09-01 1986-07-15 Moll Richard J Apparatus for detecting and actuating the feeding of paper in paper folding machines
US4679935A (en) * 1983-10-28 1987-07-14 Honda Giken Kogyo Kabushikikaisha Light distribution of headlight beam
IL81364A (en) * 1987-01-23 1990-08-31 Yaacov Sadeh Electro optically corrected coordinate measuring machine
US4889425A (en) * 1987-11-02 1989-12-26 The Boeing Company Laser alignment system
FR2631711B1 (fr) * 1988-05-19 1992-03-06 Mensi Sarl Appareil pour realiser le balayage d'un faisceau lumineux dans un plan parallele a un axe donne
US8094299B2 (en) * 2008-07-24 2012-01-10 Beckman Coulter, Inc. Transducer module

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1178971A (en) * 1965-06-15 1970-01-28 Nat Res Dev Alignment of Adjustable Parts of a Structure
US3558231A (en) * 1967-10-03 1971-01-26 Gen Electric Machine zero locator
US3696248A (en) * 1970-08-26 1972-10-03 Martin Marietta Corp Laser tracking method and apparatus
US3764220A (en) * 1971-07-30 1973-10-09 Nasa Alignment apparatus using a laser having a gravitationally sensitive cavity reflector
US3752589A (en) * 1971-10-26 1973-08-14 M Kobayashi Method and apparatus for positioning patterns of a photographic mask on the surface of a wafer on the basis of backside patterns of the wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01183621A (ja) * 1988-01-18 1989-07-21 Olympus Optical Co Ltd 集光位置調節装置

Also Published As

Publication number Publication date
DE2362289C2 (de) 1983-10-20
CH561445A5 (ja) 1975-04-30
US3881107A (en) 1975-04-29
DE2362289A1 (de) 1974-06-20
GB1413698A (en) 1975-11-12
JPS5623163B2 (ja) 1981-05-29

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