JPS4991189A - - Google Patents
Info
- Publication number
- JPS4991189A JPS4991189A JP49773A JP49773A JPS4991189A JP S4991189 A JPS4991189 A JP S4991189A JP 49773 A JP49773 A JP 49773A JP 49773 A JP49773 A JP 49773A JP S4991189 A JPS4991189 A JP S4991189A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP73497A JPS5639052B2 (https=) | 1972-12-29 | 1972-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP73497A JPS5639052B2 (https=) | 1972-12-29 | 1972-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4991189A true JPS4991189A (https=) | 1974-08-30 |
| JPS5639052B2 JPS5639052B2 (https=) | 1981-09-10 |
Family
ID=11475379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP73497A Expired JPS5639052B2 (https=) | 1972-12-29 | 1972-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5639052B2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5772333A (en) * | 1980-10-23 | 1982-05-06 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS58212137A (ja) * | 1982-06-03 | 1983-12-09 | Mitsubishi Electric Corp | 半導体素子の製造方法 |
| US4999083A (en) * | 1988-10-02 | 1991-03-12 | Canon Kabushiki Kaisha | Method of etching crystalline material with etchant injection inlet |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4837232A (https=) * | 1971-09-15 | 1973-06-01 | ||
| JPS4855586A (https=) * | 1971-11-13 | 1973-08-04 | ||
| JPS4915114A (https=) * | 1972-06-02 | 1974-02-09 |
-
1972
- 1972-12-29 JP JP73497A patent/JPS5639052B2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4837232A (https=) * | 1971-09-15 | 1973-06-01 | ||
| JPS4855586A (https=) * | 1971-11-13 | 1973-08-04 | ||
| JPS4915114A (https=) * | 1972-06-02 | 1974-02-09 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5772333A (en) * | 1980-10-23 | 1982-05-06 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS58212137A (ja) * | 1982-06-03 | 1983-12-09 | Mitsubishi Electric Corp | 半導体素子の製造方法 |
| US4999083A (en) * | 1988-10-02 | 1991-03-12 | Canon Kabushiki Kaisha | Method of etching crystalline material with etchant injection inlet |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5639052B2 (https=) | 1981-09-10 |