JPS5639051B2 - - Google Patents
Info
- Publication number
- JPS5639051B2 JPS5639051B2 JP9816572A JP9816572A JPS5639051B2 JP S5639051 B2 JPS5639051 B2 JP S5639051B2 JP 9816572 A JP9816572 A JP 9816572A JP 9816572 A JP9816572 A JP 9816572A JP S5639051 B2 JPS5639051 B2 JP S5639051B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9816572A JPS5639051B2 (https=) | 1972-09-30 | 1972-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9816572A JPS5639051B2 (https=) | 1972-09-30 | 1972-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4956588A JPS4956588A (https=) | 1974-06-01 |
| JPS5639051B2 true JPS5639051B2 (https=) | 1981-09-10 |
Family
ID=14212463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9816572A Expired JPS5639051B2 (https=) | 1972-09-30 | 1972-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5639051B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56133835A (en) * | 1980-03-24 | 1981-10-20 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
| JPH0311217A (ja) * | 1989-06-07 | 1991-01-18 | Kawasaki Steel Corp | プラズマ溶融炉の操業方法 |
| JP2981673B2 (ja) * | 1990-05-31 | 1999-11-22 | セイコーインスツルメンツ株式会社 | 半導体基板の製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4837232A (https=) * | 1971-09-15 | 1973-06-01 | ||
| JPS4855586A (https=) * | 1971-11-13 | 1973-08-04 | ||
| JPS4915114A (https=) * | 1972-06-02 | 1974-02-09 |
-
1972
- 1972-09-30 JP JP9816572A patent/JPS5639051B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4956588A (https=) | 1974-06-01 |