JPS4990868A - - Google Patents

Info

Publication number
JPS4990868A
JPS4990868A JP48124585A JP12458573A JPS4990868A JP S4990868 A JPS4990868 A JP S4990868A JP 48124585 A JP48124585 A JP 48124585A JP 12458573 A JP12458573 A JP 12458573A JP S4990868 A JPS4990868 A JP S4990868A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48124585A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4990868A publication Critical patent/JPS4990868A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP48124585A 1972-12-14 1973-11-07 Pending JPS4990868A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00315246A US3854071A (en) 1972-12-14 1972-12-14 Exposure regulated scanning illumination means for electron projection systems

Publications (1)

Publication Number Publication Date
JPS4990868A true JPS4990868A (ja) 1974-08-30

Family

ID=23223530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48124585A Pending JPS4990868A (ja) 1972-12-14 1973-11-07

Country Status (5)

Country Link
US (1) US3854071A (ja)
JP (1) JPS4990868A (ja)
DE (1) DE2357232A1 (ja)
FR (2) FR49798E (ja)
GB (1) GB1444737A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961135A (ja) * 1982-09-30 1984-04-07 Toshiba Corp 電子ビ−ム転写装置
JPS6386233A (ja) * 1986-09-29 1988-04-16 Shimadzu Corp 電子線照射装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR49798E (fr) * 1972-12-14 1939-07-17 Régulateur pour l'admission d'air additionnel aux moteurs à combustion interne
JPS5788659A (en) * 1980-11-21 1982-06-02 Jeol Ltd Electron ray device
DE3172847D1 (en) * 1981-11-30 1985-12-12 Ibm Method and apparatus for improving the uniformness of patterns generated by electron beam lithography
JPH09306414A (ja) * 1996-05-15 1997-11-28 Advantest Corp 走査型電子顕微鏡を備えた電子ビーム露光装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3854071A (en) * 1972-12-14 1974-12-10 Ibm Exposure regulated scanning illumination means for electron projection systems

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3334180A (en) * 1963-11-20 1967-08-01 Hazeltine Research Inc Television receiver control circuitry coupled to the picture tube screen grid for regulating beam current
US3418520A (en) * 1966-12-21 1968-12-24 Ibm Intensity control system for a particle beam device
US3492456A (en) * 1966-12-22 1970-01-27 Hi G Inc Method and means for controlling the path of a beam of electrically charged particles
US3445717A (en) * 1968-01-17 1969-05-20 Sylvania Electric Prod Brightness signal limiting and faulty component indicating circuitry for cathode ray tube system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3854071A (en) * 1972-12-14 1974-12-10 Ibm Exposure regulated scanning illumination means for electron projection systems

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961135A (ja) * 1982-09-30 1984-04-07 Toshiba Corp 電子ビ−ム転写装置
JPS6386233A (ja) * 1986-09-29 1988-04-16 Shimadzu Corp 電子線照射装置

Also Published As

Publication number Publication date
FR2210820B1 (ja) 1976-10-01
FR49798E (fr) 1939-07-17
DE2357232A1 (de) 1974-06-20
GB1444737A (en) 1976-08-04
FR2210820A1 (ja) 1974-07-12
US3854071A (en) 1974-12-10

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