JPS4990075A - - Google Patents
Info
- Publication number
- JPS4990075A JPS4990075A JP47129950A JP12995072A JPS4990075A JP S4990075 A JPS4990075 A JP S4990075A JP 47129950 A JP47129950 A JP 47129950A JP 12995072 A JP12995072 A JP 12995072A JP S4990075 A JPS4990075 A JP S4990075A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47129950A JPS5147563B2 (en:Method) | 1972-12-27 | 1972-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47129950A JPS5147563B2 (en:Method) | 1972-12-27 | 1972-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4990075A true JPS4990075A (en:Method) | 1974-08-28 |
| JPS5147563B2 JPS5147563B2 (en:Method) | 1976-12-15 |
Family
ID=15022433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47129950A Expired JPS5147563B2 (en:Method) | 1972-12-27 | 1972-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5147563B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014150002A (ja) * | 2013-02-01 | 2014-08-21 | Horon:Kk | ノイズ低減電子ビーム装置および電子ビームノイズ低減方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI653659B (zh) | 2013-08-09 | 2019-03-11 | 日商荏原製作所股份有限公司 | 檢查裝置及檢查用圖像資料之製作方法 |
| JP6291199B2 (ja) * | 2013-09-25 | 2018-03-14 | 株式会社荏原製作所 | 検査装置および検査用画像データの生成方法 |
-
1972
- 1972-12-27 JP JP47129950A patent/JPS5147563B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014150002A (ja) * | 2013-02-01 | 2014-08-21 | Horon:Kk | ノイズ低減電子ビーム装置および電子ビームノイズ低減方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5147563B2 (en:Method) | 1976-12-15 |