JPS498831A - - Google Patents

Info

Publication number
JPS498831A
JPS498831A JP5073572A JP5073572A JPS498831A JP S498831 A JPS498831 A JP S498831A JP 5073572 A JP5073572 A JP 5073572A JP 5073572 A JP5073572 A JP 5073572A JP S498831 A JPS498831 A JP S498831A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5073572A
Other versions
JPS549472B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5073572A priority Critical patent/JPS549472B2/ja
Publication of JPS498831A publication Critical patent/JPS498831A/ja
Publication of JPS549472B2 publication Critical patent/JPS549472B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Resistance Heating (AREA)
  • Tunnel Furnaces (AREA)
JP5073572A 1972-05-24 1972-05-24 Expired JPS549472B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5073572A JPS549472B2 (ja) 1972-05-24 1972-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5073572A JPS549472B2 (ja) 1972-05-24 1972-05-24

Publications (2)

Publication Number Publication Date
JPS498831A true JPS498831A (ja) 1974-01-25
JPS549472B2 JPS549472B2 (ja) 1979-04-24

Family

ID=12867090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5073572A Expired JPS549472B2 (ja) 1972-05-24 1972-05-24

Country Status (1)

Country Link
JP (1) JPS549472B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107489A (en) * 1981-01-12 1981-08-26 Asahi Glass Co Ltd Heater for plate glass
JPS6119117A (ja) * 1984-07-05 1986-01-28 Toshiba Ceramics Co Ltd シリコンウエハ−の連続ｃｖｄコ−テイング処理方法
JPH01202814A (ja) * 1988-02-09 1989-08-15 Fujitsu Ltd 間接加熱型半導体ウェーハ処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107489A (en) * 1981-01-12 1981-08-26 Asahi Glass Co Ltd Heater for plate glass
JPS6119117A (ja) * 1984-07-05 1986-01-28 Toshiba Ceramics Co Ltd シリコンウエハ−の連続ｃｖｄコ−テイング処理方法
JPH01202814A (ja) * 1988-02-09 1989-08-15 Fujitsu Ltd 間接加熱型半導体ウェーハ処理装置

Also Published As

Publication number Publication date
JPS549472B2 (ja) 1979-04-24

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