JPS4986895A - - Google Patents
Info
- Publication number
- JPS4986895A JPS4986895A JP48130862A JP13086273A JPS4986895A JP S4986895 A JPS4986895 A JP S4986895A JP 48130862 A JP48130862 A JP 48130862A JP 13086273 A JP13086273 A JP 13086273A JP S4986895 A JPS4986895 A JP S4986895A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/126—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing rare earth metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Thin Magnetic Films (AREA)
- Hard Magnetic Materials (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00311879A US3856579A (en) | 1972-12-04 | 1972-12-04 | Sputtered magnetic materials comprising rare-earth metals and method of preparation |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4986895A true JPS4986895A (th) | 1974-08-20 |
Family
ID=23208919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP48130862A Pending JPS4986895A (th) | 1972-12-04 | 1973-11-22 |
Country Status (2)
Country | Link |
---|---|
US (1) | US3856579A (th) |
JP (1) | JPS4986895A (th) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5174605A (ja) * | 1974-12-24 | 1976-06-28 | Suwa Seikosha Kk | Jikikirokutai |
JPH01119008A (ja) * | 1987-10-30 | 1989-05-11 | Yaskawa Electric Mfg Co Ltd | 強磁性薄膜の形成方法 |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4038171A (en) * | 1976-03-31 | 1977-07-26 | Battelle Memorial Institute | Supported plasma sputtering apparatus for high deposition rate over large area |
JPS5775414A (en) * | 1980-10-28 | 1982-05-12 | Fuji Photo Film Co Ltd | Manufacture of magneti substance thin film target for sputtering |
JPS57100627A (en) * | 1980-12-12 | 1982-06-22 | Teijin Ltd | Manufacture of vertical magnetic recording medium |
JPS57143729A (en) * | 1981-02-27 | 1982-09-06 | Fuji Photo Film Co Ltd | Magnetic recording medium |
JPS57143727A (en) * | 1981-02-27 | 1982-09-06 | Fuji Photo Film Co Ltd | Magnetic recording medium |
JPS57143728A (en) * | 1981-02-27 | 1982-09-06 | Fuji Photo Film Co Ltd | Magnetic recording medium |
US4684454A (en) * | 1983-05-17 | 1987-08-04 | Minnesota Mining And Manufacturing Company | Sputtering process for making magneto optic alloy |
US4620872A (en) * | 1984-10-18 | 1986-11-04 | Mitsubishi Kinzoku Kabushiki Kaisha | Composite target material and process for producing the same |
US4897283A (en) * | 1985-12-20 | 1990-01-30 | The Charles Stark Draper Laboratory, Inc. | Process of producing aligned permanent magnets |
GB8605878D0 (en) * | 1986-03-10 | 1986-04-16 | Johnson Matthey Plc | Casting transition metal alloy |
US4715891A (en) * | 1986-10-17 | 1987-12-29 | Ovonic Synthetic Materials Company, Inc. | Method of preparing a magnetic material |
US4822675A (en) * | 1987-01-14 | 1989-04-18 | Minnesota Mining And Manufacturing Company | Stable magneto optic recording medium |
US4950556A (en) * | 1987-10-26 | 1990-08-21 | Minnesota Mining And Manufacturing Company | Magneto-optic recording medium |
JP2673807B2 (ja) * | 1987-10-30 | 1997-11-05 | パイオニア株式会社 | 光磁気記録媒体の製造方法 |
US5439500A (en) * | 1993-12-02 | 1995-08-08 | Materials Research Corporation | Magneto-optical alloy sputter targets |
US10060021B2 (en) * | 2011-09-22 | 2018-08-28 | Shibaura Institute Of Technology | Thin-film formation method, thin-film formation device, object to be processed having coating film formed thereof, die and tool |
CN105755441B (zh) * | 2016-04-20 | 2019-01-11 | 中国科学院宁波材料技术与工程研究所 | 一种磁控溅射法扩渗重稀土提高烧结钕铁硼矫顽力的方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3615911A (en) * | 1969-05-16 | 1971-10-26 | Bell Telephone Labor Inc | Sputtered magnetic films |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3303117A (en) * | 1964-12-23 | 1967-02-07 | Ibm | Process for cathodically sputtering a ferromagnetic thin film of a nickeliron-molybdenum alloy |
NL6608335A (th) * | 1966-06-16 | 1967-12-18 | ||
US3629118A (en) * | 1969-05-05 | 1971-12-21 | Morris D Isserlis | Ferrite powder and method of preparing it |
JPS4941012B1 (th) * | 1970-06-11 | 1974-11-06 | ||
US3684593A (en) * | 1970-11-02 | 1972-08-15 | Gen Electric | Heat-aged sintered cobalt-rare earth intermetallic product and process |
-
1972
- 1972-12-04 US US00311879A patent/US3856579A/en not_active Expired - Lifetime
-
1973
- 1973-11-22 JP JP48130862A patent/JPS4986895A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3615911A (en) * | 1969-05-16 | 1971-10-26 | Bell Telephone Labor Inc | Sputtered magnetic films |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5174605A (ja) * | 1974-12-24 | 1976-06-28 | Suwa Seikosha Kk | Jikikirokutai |
JPH01119008A (ja) * | 1987-10-30 | 1989-05-11 | Yaskawa Electric Mfg Co Ltd | 強磁性薄膜の形成方法 |
Also Published As
Publication number | Publication date |
---|---|
US3856579A (en) | 1974-12-24 |