JPS4984790A - - Google Patents
Info
- Publication number
- JPS4984790A JPS4984790A JP47128209A JP12820972A JPS4984790A JP S4984790 A JPS4984790 A JP S4984790A JP 47128209 A JP47128209 A JP 47128209A JP 12820972 A JP12820972 A JP 12820972A JP S4984790 A JPS4984790 A JP S4984790A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47128209A JPS4984790A (fr) | 1972-12-22 | 1972-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47128209A JPS4984790A (fr) | 1972-12-22 | 1972-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4984790A true JPS4984790A (fr) | 1974-08-14 |
Family
ID=14979167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47128209A Pending JPS4984790A (fr) | 1972-12-22 | 1972-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4984790A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5429978A (en) * | 1977-08-10 | 1979-03-06 | Hitachi Ltd | Carrier device for semiconductor wafer and mask |
-
1972
- 1972-12-22 JP JP47128209A patent/JPS4984790A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5429978A (en) * | 1977-08-10 | 1979-03-06 | Hitachi Ltd | Carrier device for semiconductor wafer and mask |