JPS4982504A - - Google Patents

Info

Publication number
JPS4982504A
JPS4982504A JP13062973A JP13062973A JPS4982504A JP S4982504 A JPS4982504 A JP S4982504A JP 13062973 A JP13062973 A JP 13062973A JP 13062973 A JP13062973 A JP 13062973A JP S4982504 A JPS4982504 A JP S4982504A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13062973A
Other languages
Japanese (ja)
Other versions
JPS5230242B2 (sv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2257667A external-priority patent/DE2257667C3/de
Application filed filed Critical
Publication of JPS4982504A publication Critical patent/JPS4982504A/ja
Publication of JPS5230242B2 publication Critical patent/JPS5230242B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13062973A 1972-11-24 1973-11-20 Expired JPS5230242B2 (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2257667A DE2257667C3 (de) 1971-11-30 1972-11-24 Düse zum Einblasen von heißen Gasen in einen Schachtofen

Publications (2)

Publication Number Publication Date
JPS4982504A true JPS4982504A (sv) 1974-08-08
JPS5230242B2 JPS5230242B2 (sv) 1977-08-06

Family

ID=5862625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13062973A Expired JPS5230242B2 (sv) 1972-11-24 1973-11-20

Country Status (1)

Country Link
JP (1) JPS5230242B2 (sv)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH058993Y2 (sv) * 1986-07-28 1993-03-05
JPH0443227Y2 (sv) * 1986-09-25 1992-10-13

Also Published As

Publication number Publication date
JPS5230242B2 (sv) 1977-08-06

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