JPS4982504A - - Google Patents
Info
- Publication number
- JPS4982504A JPS4982504A JP13062973A JP13062973A JPS4982504A JP S4982504 A JPS4982504 A JP S4982504A JP 13062973 A JP13062973 A JP 13062973A JP 13062973 A JP13062973 A JP 13062973A JP S4982504 A JPS4982504 A JP S4982504A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2257667A DE2257667C3 (de) | 1971-11-30 | 1972-11-24 | Düse zum Einblasen von heißen Gasen in einen Schachtofen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4982504A true JPS4982504A (en:Method) | 1974-08-08 |
| JPS5230242B2 JPS5230242B2 (en:Method) | 1977-08-06 |
Family
ID=5862625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13062973A Expired JPS5230242B2 (en:Method) | 1972-11-24 | 1973-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5230242B2 (en:Method) |
-
1973
- 1973-11-20 JP JP13062973A patent/JPS5230242B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5230242B2 (en:Method) | 1977-08-06 |