JPS4978480A - - Google Patents
Info
- Publication number
- JPS4978480A JPS4978480A JP12006772A JP12006772A JPS4978480A JP S4978480 A JPS4978480 A JP S4978480A JP 12006772 A JP12006772 A JP 12006772A JP 12006772 A JP12006772 A JP 12006772A JP S4978480 A JPS4978480 A JP S4978480A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thyristors (AREA)
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12006772A JPS5648969B2 (en。) | 1972-11-30 | 1972-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12006772A JPS5648969B2 (en。) | 1972-11-30 | 1972-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4978480A true JPS4978480A (en。) | 1974-07-29 |
| JPS5648969B2 JPS5648969B2 (en。) | 1981-11-19 |
Family
ID=14777057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12006772A Expired JPS5648969B2 (en。) | 1972-11-30 | 1972-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5648969B2 (en。) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62202530A (ja) * | 1986-02-28 | 1987-09-07 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6662453B2 (ja) | 2016-05-26 | 2020-03-11 | 株式会社ニコン | パルス光生成装置、パルス光生成方法、パルス光生成装置を備えた露光装置および検査装置 |
| WO2017204113A1 (ja) | 2016-05-26 | 2017-11-30 | 株式会社ニコン | パルス光生成装置、パルス光生成方法、パルス光生成装置を備えた露光装置および検査装置 |
-
1972
- 1972-11-30 JP JP12006772A patent/JPS5648969B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62202530A (ja) * | 1986-02-28 | 1987-09-07 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5648969B2 (en。) | 1981-11-19 |