JPS5648969B2 - - Google Patents
Info
- Publication number
- JPS5648969B2 JPS5648969B2 JP12006772A JP12006772A JPS5648969B2 JP S5648969 B2 JPS5648969 B2 JP S5648969B2 JP 12006772 A JP12006772 A JP 12006772A JP 12006772 A JP12006772 A JP 12006772A JP S5648969 B2 JPS5648969 B2 JP S5648969B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Thyristors (AREA)
- Die Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12006772A JPS5648969B2 (ja) | 1972-11-30 | 1972-11-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12006772A JPS5648969B2 (ja) | 1972-11-30 | 1972-11-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4978480A JPS4978480A (ja) | 1974-07-29 |
JPS5648969B2 true JPS5648969B2 (ja) | 1981-11-19 |
Family
ID=14777057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12006772A Expired JPS5648969B2 (ja) | 1972-11-30 | 1972-11-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5648969B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11303091B2 (en) | 2016-05-26 | 2022-04-12 | Nikon Corporation | Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device |
US11366070B2 (en) | 2016-05-26 | 2022-06-21 | Nikon Corporation | Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0693467B2 (ja) * | 1986-02-28 | 1994-11-16 | 三菱電機株式会社 | 半導体装置の製造方法 |
-
1972
- 1972-11-30 JP JP12006772A patent/JPS5648969B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11303091B2 (en) | 2016-05-26 | 2022-04-12 | Nikon Corporation | Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device |
US11366070B2 (en) | 2016-05-26 | 2022-06-21 | Nikon Corporation | Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device |
Also Published As
Publication number | Publication date |
---|---|
JPS4978480A (ja) | 1974-07-29 |