JPS5648969B2 - - Google Patents

Info

Publication number
JPS5648969B2
JPS5648969B2 JP12006772A JP12006772A JPS5648969B2 JP S5648969 B2 JPS5648969 B2 JP S5648969B2 JP 12006772 A JP12006772 A JP 12006772A JP 12006772 A JP12006772 A JP 12006772A JP S5648969 B2 JPS5648969 B2 JP S5648969B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12006772A
Other versions
JPS4978480A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12006772A priority Critical patent/JPS5648969B2/ja
Publication of JPS4978480A publication Critical patent/JPS4978480A/ja
Publication of JPS5648969B2 publication Critical patent/JPS5648969B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)
  • Die Bonding (AREA)
JP12006772A 1972-11-30 1972-11-30 Expired JPS5648969B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12006772A JPS5648969B2 (ja) 1972-11-30 1972-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12006772A JPS5648969B2 (ja) 1972-11-30 1972-11-30

Publications (2)

Publication Number Publication Date
JPS4978480A JPS4978480A (ja) 1974-07-29
JPS5648969B2 true JPS5648969B2 (ja) 1981-11-19

Family

ID=14777057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12006772A Expired JPS5648969B2 (ja) 1972-11-30 1972-11-30

Country Status (1)

Country Link
JP (1) JPS5648969B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11303091B2 (en) 2016-05-26 2022-04-12 Nikon Corporation Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device
US11366070B2 (en) 2016-05-26 2022-06-21 Nikon Corporation Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0693467B2 (ja) * 1986-02-28 1994-11-16 三菱電機株式会社 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11303091B2 (en) 2016-05-26 2022-04-12 Nikon Corporation Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device
US11366070B2 (en) 2016-05-26 2022-06-21 Nikon Corporation Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device

Also Published As

Publication number Publication date
JPS4978480A (ja) 1974-07-29

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